Assignee
HOLTRONIC TECHNOLOGIES LTD
GB·9 granted patents·273 citations·filing 1987–1999
Top patents by PatentIndex Score
9 records- 0187US4857425AManufacture of integrated circuits using holographic techniquesHOLTRONIC TECHNOLOGIES LTD·Filed 1987·Granted Aug 15, 1989·88 cites·15 claims
- 0284US5187372AApparatus for and a method of transverse position measurement in proximity lithographic systemsHOLTRONIC TECHNOLOGIES LTD·Filed 1991·Granted Feb 16, 1993·73 cites·21 claims
- 0357US4966428AManufacture of integrated circuits using holographic techniquesHOLTRONIC TECHNOLOGIES LTD·Filed 1989·Granted Oct 30, 1990·23 cites·10 claims
- 0456US5640257AApparatus and method for the manufacture of high uniformity total internal reflection hologramsHOLTRONIC TECHNOLOGIES LTD·Filed 1995·Granted Jun 17, 1997·18 cites·32 claims
- 0555US5695894AMethod and apparatus for changing the scale of a pattern printed from a total internal reflection hologramHOLTRONIC TECHNOLOGIES LTD·Filed 1996·Granted Dec 9, 1997·24 cites·27 claims
- 0653US6329104B1Position alignment system for holographic lithography processHOLTRONIC TECHNOLOGIES LTD·Filed 1999·Granted Dec 11, 2001·15 cites·10 claims
- 0743US6005666AApparatus for and method of optical inspection in total internal reflection holographic imaging systemHOLTRONIC TECHNOLOGIES LTD·Filed 1990·Granted Dec 21, 1999·13 cites·20 claims
- 0835US6226110B1Method and apparatus for holographically recording an essentially periodic patternHOLTRONIC TECHNOLOGIES LTD·Filed 1997·Granted May 1, 2001·16 cites·16 claims
- 0930US4917497AMethod of and apparatus for the positional detection of objectsHOLTRONIC TECHNOLOGIES LTD·Filed 1987·Granted Apr 17, 1990·3 cites·14 claims
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