Assignee
HONDA MASANOBU
JP·21 granted patents·1 pending application·125 citations·filing 2006–2011
Top patents by PatentIndex Score
22 records- 0198US8524331B2Substrate processing methodHONDA MASANOBU·Filed 2010·Granted Sep 3, 2013·35 cites·6 claims
- 0293US8790489B2Substrate processing apparatus and substrate processing methodHONDA MASANOBU·Filed 2011·Granted Jul 29, 2014·17 cites·7 claims
- 0393US8642483B2Substrate processing with shrink etching stepHONDA MASANOBU·Filed 2010·Granted Feb 4, 2014·15 cites·26 claims
- 0486US8545671B2Plasma processing method and plasma processing apparatusHONDA MASANOBU·Filed 2011·Granted Oct 1, 2013·7 cites·6 claims
- 0585US8105949B2Substrate processing methodHONDA MASANOBU·Filed 2009·Granted Jan 31, 2012·10 cites·9 claims
- 0682US8440572B2Si etching methodHONDA MASANOBU·Filed 2009·Granted May 14, 2013·7 cites·10 claims
- 0781US8303834B2Plasma processing apparatus and plasma etching methodHONDA MASANOBU·Filed 2009·Granted Nov 6, 2012·6 cites·12 claims
- 0881US8104428B2Plasma processing apparatusHONDA MASANOBU·Filed 2007·Granted Jan 31, 2012·4 cites·2 claims
- 0977US8241514B2Plasma etching method and computer readable storage mediumHONDA MASANOBU·Filed 2009·Granted Aug 14, 2012·5 cites·20 claims
- 1075US8173036B2Plasma processing method and apparatusHONDA MASANOBU·Filed 2006·Granted May 8, 2012·5 cites·12 claims
- 1173US8999068B2Chamber cleaning methodHONDA MASANOBU·Filed 2010·Granted Apr 7, 2015·3 cites·8 claims
- 1273US8057603B2Method of cleaning substrate processing chamber, storage medium, and substrate processing chamberHONDA MASANOBU·Filed 2007·Granted Nov 15, 2011·2 cites·2 claims
- 1372US8263499B2Plasma processing method and computer readable storage mediumHONDA MASANOBU·Filed 2009·Granted Sep 11, 2012·4 cites·21 claims
- 1469US8157952B2Plasma processing chamber, potential controlling apparatus, potential controlling method, program for implementing the method, and storage medium storing the programHONDA MASANOBU·Filed 2006·Granted Apr 17, 2012·2 cites·5 claims
- 1564US8557706B2Substrate processing methodHONDA MASANOBU·Filed 2011·Granted Oct 15, 2013·1 cites·9 claims
- 1663US8404595B2Plasma processing methodHONDA MASANOBU·Filed 2007·Granted Mar 26, 2013·1 cites·6 claims
- 1762US8141514B2Plasma processing apparatus, plasma processing method, and storage mediumHONDA MASANOBU·Filed 2007·Granted Mar 27, 2012·1 cites·1 claims
- 1856US8840753B2Plasma etching unitHONDA MASANOBU·Filed 2009·Granted Sep 23, 2014·0 cites·20 claims
- 1954US8671882B2Plasma processing apparatusHONDA MASANOBU·Filed 2008·Granted Mar 18, 2014·0 cites·20 claims
- 2052US8293655B2Dry etching methodHONDA MASANOBU·Filed 2009·Granted Oct 23, 2012·0 cites·17 claims
- 2148US9362090B2Plasma processing apparatus, plasma processing method, and storage mediumHONDA MASANOBU·Filed 2010·Granted Jun 7, 2016·0 cites·4 claims
- 2242US2007256638A1Electrode plate for use in plasma processing and plasma processing systemHONDA MASANOBU·Filed 2007·Application pending·0 cites
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