Assignee
HONDA MINORU
JP·4 granted patents·3 pending applications·12 citations·filing 2007–2012
Top patents by PatentIndex Score
7 records- 0173US8158535B2Method for forming insulating film and method for manufacturing semiconductor deviceHONDA MINORU·Filed 2007·Granted Apr 17, 2012·4 cites·14 claims
- 0271US8247331B2Method for forming insulating film and method for manufacturing semiconductor deviceHONDA MINORU·Filed 2007·Granted Aug 21, 2012·3 cites·16 claims
- 0370US9278049B2Double-chamber container and method for manufacturing sameHONDA MINORU·Filed 2012·Granted Mar 8, 2016·3 cites·2 claims
- 0463US8119545B2Forming a silicon nitride film by plasma CVDHONDA MINORU·Filed 2009·Granted Feb 21, 2012·2 cites·7 claims
- 0546US2012126376A1Silicon dioxide film and process for production thereof, computer-readable storage medium, and plasma cvd deviceHONDA MINORU·Filed 2009·Application pending·0 cites
- 0637US2012153442A1Silicon nitride film and process for production thereof, computer-readable storage medium, and plasma cvd deviceHONDA MINORU·Filed 2011·Application pending·0 cites
- 0736US2012208376A1Method of forming silicon nitride film and method of manufacturing semiconductor memory deviceHONDA MINORU·Filed 2010·Application pending·0 cites
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