Assignee
HORIBA STEC CO LTD
JP·165 granted patents·68 pending applications·408 citations·filing 2005–2025
Top patents by PatentIndex Score
233 records- 0196US11841720B2Flow rate controller, flow rate control method, and program recording medium for flow rate controllerHORIBA STEC CO LTD·Filed 2022·Granted Dec 12, 2023·5 cites·13 claims
- 0295US10655220B2Gas control system, deposition apparatus including gas control system, and program and gas control method used for gas control systemHORIBA STEC CO LTD·Filed 2018·Granted May 19, 2020·7 cites·19 claims
- 0395US8910656B2Fluid controllerHORIBA STEC CO LTD·Filed 2013·Granted Dec 16, 2014·26 cites·6 claims
- 0495US8789556B2Flow rate control device, diagnostic device for use in flow rate measuring mechanism or for use in flow rate control device including the flow rate measuring mechanism and recording medium having diagnostic program recorded thereon for use in the sameHORIBA STEC CO LTD·Filed 2012·Granted Jul 29, 2014·24 cites·9 claims
- 0593US11631596B2Concentration control apparatus, source consumption quantity estimation method, and program recording medium on which a program for a concentration control apparatus is recordedHORIBA STEC CO LTD·Filed 2020·Granted Apr 18, 2023·3 cites·9 claims
- 0693US11454993B2Flow rate control apparatus, flow rate control method, and program recording medium recording flow rate control programHORIBA STEC CO LTD·Filed 2021·Granted Sep 27, 2022·3 cites·20 claims
- 0793US7881829B2Mass flow controllerHORIBA STEC CO LTD·Filed 2007·Granted Feb 1, 2011·31 cites·10 claims
- 0892US9057636B2Self-calibrating mechanism and self-calibrating method for flow rate sensor, and diagnostic mechanism and diagnostic method for fluid sensorHORIBA STEC CO LTD·Filed 2013·Granted Jun 16, 2015·10 cites·8 claims
- 0992US8356623B2Mass flow meter and mass flow controllerHORIBA STEC CO LTD·Filed 2009·Granted Jan 22, 2013·59 cites·6 claims
- 1091US9328826B2Fluid control valve and mass flow controllerHORIBA STEC CO LTD·Filed 2013·Granted May 3, 2016·10 cites·11 claims
- 1191US7431045B2Flow restrictorHORIBA STEC CO LTD·Filed 2005·Granted Oct 7, 2008·34 cites·3 claims
- 1290US12306644B2Hybrid flow ratio controller system with channels for flow ratio control, flow rate or pressure control, and overflow controlHORIBA STEC CO LTD·Filed 2022·Granted May 20, 2025·1 cites·20 claims
- 1390US10240679B2High conductance valve for fluids and vaporsHORIBA STEC CO LTD·Filed 2015·Granted Mar 26, 2019·7 cites·3 claims
- 1489US10969019B2Fluid control device, recording medium recorded with control program, and control methodHORIBA STEC CO LTD·Filed 2018·Granted Apr 6, 2021·4 cites·10 claims
- 1588US9188990B2Fluid mechanism, support member constituting fluid mechanism and fluid control systemHORIBA STEC CO LTD·Filed 2012·Granted Nov 17, 2015·9 cites·7 claims
- 1688US8646307B2Mass flow controller verifying system, verifying method and verifying programHORIBA STEC CO LTD·Filed 2013·Granted Feb 11, 2014·7 cites·4 claims
- 1788US8019481B2Flow rate ratio control deviceHORIBA STEC CO LTD·Filed 2007·Granted Sep 13, 2011·25 cites·3 claims
- 1887US12025999B2Flow rate control valve and flow rate control deviceHORIBA STEC CO LTD·Filed 2020·Granted Jul 2, 2024·2 cites·6 claims
- 1987US10996689B2Flow rate ratio control device with flow velocity control modeHORIBA STEC CO LTD·Filed 2017·Granted May 4, 2021·5 cites·10 claims
- 2087US10138555B2Gas control system and program for gas control systemHORIBA STEC CO LTD·Filed 2016·Granted Nov 27, 2018·3 cites·7 claims
- 2187US9797765B2Self-calibrating mechanism and self-calibrating method for flow rate sensor, and diagnostic mechanism and diagnostic method for fluid sensorHORIBA STEC CO LTD·Filed 2015·Granted Oct 24, 2017·6 cites·7 claims
- 2286US11537150B2Fluid control apparatusHORIBA STEC CO LTD·Filed 2021·Granted Dec 27, 2022·2 cites·16 claims
- 2385US11680646B2Fluid control valve, fluid control device, valve element, and method of manufacturing valve elementHORIBA STEC CO LTD·Filed 2022·Granted Jun 20, 2023·1 cites·12 claims
- 2485US9304030B2Flow rate control deviceHORIBA STEC CO LTD·Filed 2015·Granted Apr 5, 2016·6 cites·2 claims
- 2585US9109736B2Fluid resistance deviceHORIBA STEC CO LTD·Filed 2013·Granted Aug 18, 2015·11 cites·7 claims
- 2684US11066746B1Liquid material vaporization and supply device, and control programHORIBA STEC CO LTD·Filed 2018·Granted Jul 20, 2021·2 cites·15 claims
- 2784US11036242B2Calibration data generation apparatus, calibration data generation method, and flow rate control deviceHORIBA STEC CO LTD·Filed 2018·Granted Jun 15, 2021·4 cites·8 claims
- 2884US10927462B2Gas control system and film formation apparatus provided with gas control systemHORIBA STEC CO LTD·Filed 2017·Granted Feb 23, 2021·4 cites·12 claims
- 2984US10545514B2Flow rate control apparatus, flow rate control method, and program recording mediumHORIBA STEC CO LTD·Filed 2018·Granted Jan 28, 2020·3 cites·8 claims
- 3084US8755679B2Liquid material vaporizerHORIBA STEC CO LTD·Filed 2012·Granted Jun 17, 2014·7 cites·4 claims
- 3183US11982371B2Fluid control valve and fluid control apparatusHORIBA STEC CO LTD·Filed 2022·Granted May 14, 2024·1 cites·10 claims
- 3283US10718050B2Concentration control apparatus and material gas supply systemHORIBA STEC CO LTD·Filed 2018·Granted Jul 21, 2020·1 cites·19 claims
- 3382US9823667B2Flow rate control apparatus, storage medium storing program for flow rate control apparatus and flow rate control methodHORIBA STEC CO LTD·Filed 2015·Granted Nov 21, 2017·5 cites·7 claims
- 3482US9075414B2Pressure control device, flow rate control device and recording medium having programs used for pressure control device, recording medium having programs used for flow rate control deviceHORIBA STEC CO LTD·Filed 2013·Granted Jul 7, 2015·11 cites·7 claims
- 3581US10941867B2High conductance valve for fluids and vaporsHORIBA STEC CO LTD·Filed 2019·Granted Mar 9, 2021·2 cites·12 claims
- 3681US10503179B2Flow rate control apparatus and program recording medium having recorded therein program for flow rate control apparatusHORIBA STEC CO LTD·Filed 2017·Granted Dec 10, 2019·4 cites·10 claims
- 3781US10323771B2Fluid control valve and recording medium with control program thereof recorded thereinHORIBA STEC CO LTD·Filed 2016·Granted Jun 18, 2019·4 cites·4 claims
- 3880US11860018B2Rate-of-change flow measurement deviceHORIBA STEC CO LTD·Filed 2021·Granted Jan 2, 2024·1 cites·20 claims
- 3980US10704936B2Flow rate characteristic function identification method, flow rate characteristic function identification device, storage medium storing flow rate characteristic function identification program, and flow rate sensor or flow rate control device using themHORIBA STEC CO LTD·Filed 2017·Granted Jul 7, 2020·2 cites·7 claims
- 4080US10309810B2Pressure type flowmeterHORIBA STEC CO LTD·Filed 2017·Granted Jun 4, 2019·2 cites·5 claims
- 4180US9823181B2Cp2Mg concentration measuring deviceHORIBA STEC CO LTD·Filed 2016·Granted Nov 21, 2017·2 cites·6 claims
- 4279US11262222B2Fluid device and program for fluid deviceHORIBA STEC CO LTD·Filed 2018·Granted Mar 1, 2022·2 cites·12 claims
- 4378US10890475B2Diagnostic system, diagnostic method, diagnostic program, and flow rate controllerHORIBA STEC CO LTD·Filed 2018·Granted Jan 12, 2021·2 cites·9 claims
- 4476US9625048B2Interlace lifting mechanismHORIBA STEC CO LTD·Filed 2014·Granted Apr 18, 2017·3 cites·15 claims
- 4575US10612131B2Vaporization system and vaporization system programHORIBA STEC CO LTD·Filed 2018·Granted Apr 7, 2020·1 cites·4 claims
- 4675US7802482B2Diaphragm attaching structure of electrostatic capacity type pressure gaugeHORIBA STEC CO LTD·Filed 2006·Granted Sep 28, 2010·9 cites·15 claims
- 4774US9970865B2Decomposition detecting unit, concentration measuring unit, and concentration control apparatusHORIBA STEC CO LTD·Filed 2015·Granted May 15, 2018·1 cites·9 claims
- 4874US9222923B2Data processing device for gas chromatograph and data processing program used in sameHORIBA STEC CO LTD·Filed 2014·Granted Dec 29, 2015·2 cites·10 claims
- 4973US11789435B2Flow control device, diagnostic method, and program for flow control deviceHORIBA STEC CO LTD·Filed 2019·Granted Oct 17, 2023·1 cites·9 claims
- 5073US9746102B2Fluid control valveHORIBA STEC CO LTD·Filed 2014·Granted Aug 29, 2017·4 cites·7 claims
Showing the top 50 of 233 patent records by PatentIndex Score.
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