Assignee
HORIGUCHI YUSUKE
JP·3 granted patents·13 citations·filing 2007–2010
Top patents by PatentIndex Score
3 records- 0181US8481247B2Resist underlayer film forming composition containing liquid additiveHORIGUCHI YUSUKE·Filed 2007·Granted Jul 9, 2013·9 cites·5 claims
- 0263US9436085B2Composition for forming photosensitive resist underlayer filmHORIGUCHI YUSUKE·Filed 2010·Granted Sep 6, 2016·1 cites·2 claims
- 0347US8227172B2Method of producing semiconductor device using resist underlayer film by photo-crosslinking curingHORIGUCHI YUSUKE·Filed 2007·Granted Jul 24, 2012·3 cites·3 claims
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