Assignee
HUA ZHONG QIANG
US·1 granted patent·2 pending applications·3 citations·filing 2010–2011
Top patents by PatentIndex Score
3 records- 0166US8404583B2Conformality of oxide layers along sidewalls of deep viasHUA ZHONG QIANG·Filed 2011·Granted Mar 26, 2013·3 cites·10 claims
- 0241US2012015113A1Methods for forming low stress dielectric filmsHUA ZHONG QIANG·Filed 2010·Application pending·0 cites
- 0331US2012058281A1Methods for forming low moisture dielectric filmsHUA ZHONG QIANG·Filed 2011·Application pending·0 cites
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