Assignee
HUI KEUNG
TW·3 granted patents·19 citations·filing 2010–2010
Top patents by PatentIndex Score
3 records- 0188US9102033B2Apparatus and method for target thickness and surface profile uniformity control of multi-head chemical mechanical polishing processHUI KEUNG·Filed 2010·Granted Aug 11, 2015·11 cites·20 claims
- 0287US8309444B2System and method of dosage profile controlHUI KEUNG·Filed 2010·Granted Nov 13, 2012·8 cites·16 claims
- 0336US8294124B2Scanning method and system using 2-D ion implanterHUI KEUNG·Filed 2010·Granted Oct 23, 2012·0 cites·7 claims
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