Assignee
HUNG CHI YUAN
CN·2 granted patents·5 citations·filing 2011–2011
Technology mixG03F2
Top patents by PatentIndex Score
2 records- 0181US8501376B2System and method for test pattern for lithography processHUNG CHI YUAN·Filed 2011·Granted Aug 6, 2013·5 cites·19 claims
- 0241US8541147B2System and method of selective optical pattern enhancement for semiconductor manufacturingHUNG CHI YUAN·Filed 2011·Granted Sep 24, 2013·0 cites·20 claims
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