Assignee
ICT INTEGRATED CIRCUIT TESTING GES FÜR HALBLEITERPRÜFTECHNIK MBH
DE·16 granted patents·117 citations·filing 2014–2019
Top patents by PatentIndex Score
16 records- 0195US9666406B1Charged particle beam device, system for a charged particle beam device, and method for operating a charged particle beam deviceICT INTEGRATED CIRCUIT TESTING GES FÜR HALBLEITERPRÜFTECHNIK MBH·Filed 2016·Granted May 30, 2017·19 cites·15 claims
- 0295US9620329B1Electrostatic multipole device, electrostatic multipole arrangement, charged particle beam device, and method of manufacturing an electrostatic multipole deviceICT INTEGRATED CIRCUIT TESTING GES FÜR HALBLEITERPRÜFTECHNIK MBH·Filed 2015·Granted Apr 11, 2017·14 cites·20 claims
- 0394US9847208B1Electron beam device, cold field emitter, and method for regeneration of a cold field emitterICT INTEGRATED CIRCUIT TESTING GES FÜR HALBLEITERPRÜFTECHNIK MBH·Filed 2016·Granted Dec 19, 2017·11 cites·15 claims
- 0494US9666405B1System for imaging a signal charged particle beam, method for imaging a signal charged particle beam, and charged particle beam deviceICT INTEGRATED CIRCUIT TESTING GES FÜR HALBLEITERPRÜFTECHNIK MBH·Filed 2016·Granted May 30, 2017·13 cites·16 claims
- 0594US9601303B2Charged particle beam device and method for inspecting and/or imaging a sampleICT INTEGRATED CIRCUIT TESTING GES FÜR HALBLEITERPRÜFTECHNIK MBH·Filed 2015·Granted Mar 21, 2017·11 cites·18 claims
- 0693US9620328B1Electrostatic multipole device, electrostatic multipole arrangement, charged particle beam device, and method of operating an electrostatic multipole deviceICT INTEGRATED CIRCUIT TESTING GES FÜR HALBLEITERPRÜFTECHNIK MBH·Filed 2015·Granted Apr 11, 2017·13 cites·19 claims
- 0787US9633815B1Emitter for an electron beam, electron beam device and method for producing and operating an electron emitterICT INTEGRATED CIRCUIT TESTING GES FÜR HALBLEITERPRÜFTECHNIK MBH·Filed 2016·Granted Apr 25, 2017·11 cites·20 claims
- 0886US9697983B1Thermal field emitter tip, electron beam device including a thermal field emitter tip and method for operating an electron beam deviceICT INTEGRATED CIRCUIT TESTING GES FÜR HALBLEITERPRÜFTECHNIK MBH·Filed 2016·Granted Jul 4, 2017·7 cites·20 claims
- 0986US9589763B1Method for detecting signal charged particles in a charged particle beam device, and charged particle beam deviceICT INTEGRATED CIRCUIT TESTING GES FÜR HALBLEITERPRÜFTECHNIK MBH·Filed 2015·Granted Mar 7, 2017·4 cites·15 claims
- 1086US9472373B1Beam separator device, charged particle beam device and methods of operating thereofICT INTEGRATED CIRCUIT TESTING GES FÜR HALBLEITERPRÜFTECHNIK MBH·Filed 2015·Granted Oct 18, 2016·7 cites·20 claims
- 1182US9754759B2Electrostatic multipole device, electrostatic multipole arrangement, and method of manufacturing an electrostatic multipole deviceICT INTEGRATED CIRCUIT TESTING GES FÜR HALBLEITERPRÜFTECHNIK MBH·Filed 2015·Granted Sep 5, 2017·3 cites·19 claims
- 1279US9666404B2Charged particle source arrangement for a charged particle beam device, charged particle beam device for sample inspection, and method for providing a primary charged particle beam for sample inspection in a charged particle beamICT INTEGRATED CIRCUIT TESTING GES FÜR HALBLEITERPRÜFTECHNIK MBH·Filed 2016·Granted May 30, 2017·2 cites·18 claims
- 1368US9805908B2Signal charged particle deflection device, signal charged particle detection system, charged particle beam device and method of detection of a signal charged particle beamICT INTEGRATED CIRCUIT TESTING GES FÜR HALBLEITERPRÜFTECHNIK MBH·Filed 2016·Granted Oct 31, 2017·1 cites·20 claims
- 1466US9595417B2High resolution charged particle beam device and method of operating the sameICT INTEGRATED CIRCUIT TESTING GES FÜR HALBLEITERPRÜFTECHNIK MBH·Filed 2014·Granted Mar 14, 2017·1 cites·16 claims
- 1548US10748743B1Device and method for operating a charged particle device with multiple beamletsICT INTEGRATED CIRCUIT TESTING GES FÜR HALBLEITERPRÜFTECHNIK MBH·Filed 2019·Granted Aug 18, 2020·0 cites·21 claims
- 1647US9673017B1Housing device for magnetic shielding, housing arrangement for magnetic shielding, charged particle beam device, and method of manufacturing a housing deviceICT INTEGRATED CIRCUIT TESTING GES FÜR HALBLEITERPRÜFTECHNIK MBH·Filed 2015·Granted Jun 6, 2017·0 cites·20 claims
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