Assignee

ICT INTEGRATED CIRCUIT TESTING GES FUER HALBLEITERPRUEFTECHNIK MBH

DE·38 granted patents·19 pending applications·75 citations·filing 2015–2024

Technology mixH01J57 G01N7 G06T4 G01B2 G02B2 G03F2

Top patents by PatentIndex Score

57 records

0198US10861666B1Method of operating a charged particle gun, charged particle gun, and charged particle beam deviceICT INTEGRATED CIRCUIT TESTING GES FUER HALBLEITERPRUEFTECHNIK MBH·Filed 2020·Granted Dec 8, 2020·5 cites·8 claims
0297US10483080B1Charged particle beam device, multi-beam blanker for a charged particle beam device, and method for operating a charged particle beam deviceICT INTEGRATED CIRCUIT TESTING GES FUER HALBLEITERPRUEFTECHNIK MBH·Filed 2018·Granted Nov 19, 2019·22 cites·21 claims
0392US10176965B1Aberration-corrected multibeam source, charged particle beam device and method of imaging or illuminating a specimen with an array of primary charged particle beamletsICT INTEGRATED CIRCUIT TESTING GES FUER HALBLEITERPRUEFTECHNIK MBH·Filed 2017·Granted Jan 8, 2019·22 cites·20 claims
0490US11495433B1Charged particle beam apparatus, multi-beamlet assembly, and method of inspecting a specimenICT INTEGRATED CIRCUIT TESTING GES FUER HALBLEITERPRUEFTECHNIK MBH·Filed 2021·Granted Nov 8, 2022·3 cites·18 claims
0587US11817292B2Primary charged particle beam current measurementICT INTEGRATED CIRCUIT TESTING GES FUER HALBLEITERPRUEFTECHNIK MBH·Filed 2020·Granted Nov 14, 2023·4 cites·15 claims
0682US11545338B2Charged particle beam apparatus and method of controlling sample chargeICT INTEGRATED CIRCUIT TESTING GES FUER HALBLEITERPRUEFTECHNIK MBH·Filed 2021·Granted Jan 3, 2023·1 cites·16 claims
0782US11094501B2Secondary charged particle imaging systemICT INTEGRATED CIRCUIT TESTING GES FUER HALBLEITERPRUEFTECHNIK MBH·Filed 2019·Granted Aug 17, 2021·3 cites·25 claims
0882US10699867B2Simplified particle emitter and method of operating thereofICT INTEGRATED CIRCUIT TESTING GES FUER HALBLEITERPRUEFTECHNIK MBH·Filed 2018·Granted Jun 30, 2020·2 cites·19 claims
0980US10978270B2Charged particle beam device, interchangeable multi-aperture arrangement for a charged particle beam device, and method for operating a charged particle beam deviceICT INTEGRATED CIRCUIT TESTING GES FUER HALBLEITERPRUEFTECHNIK MBH·Filed 2018·Granted Apr 13, 2021·2 cites·16 claims
1080US10923313B1Charged particle beam device and method of operating a charged particle beam deviceICT INTEGRATED CIRCUIT TESTING GES FUER HALBLEITERPRUEFTECHNIK MBH·Filed 2019·Granted Feb 16, 2021·2 cites·22 claims
1179US10504683B2Device and method for forming a plurality of charged particle beamletsICT INTEGRATED CIRCUIT TESTING GES FUER HALBLEITERPRUEFTECHNIK MBH·Filed 2018·Granted Dec 10, 2019·2 cites·21 claims
1279US10504684B1High performance inspection scanning electron microscope device and method of operating the sameICT INTEGRATED CIRCUIT TESTING GES FUER HALBLEITERPRUEFTECHNIK MBH·Filed 2018·Granted Dec 10, 2019·2 cites·20 claims
1379US9984848B2Multi-beam lens device, charged particle beam device, and method of operating a multi-beam lens deviceICT INTEGRATED CIRCUIT TESTING GES FUER HALBLEITERPRUEFTECHNIK MBH·Filed 2016·Granted May 29, 2018·2 cites·20 claims
1476US10784070B2Charged particle beam device, field curvature corrector, and methods of operating a charged particle beam deviceICT INTEGRATED CIRCUIT TESTING GES FUER HALBLEITERPRUEFTECHNIK MBH·Filed 2018·Granted Sep 22, 2020·2 cites·16 claims
1572US11232924B2Method of operating a charged particle gun, charged particle gun, and charged particle beam deviceICT INTEGRATED CIRCUIT TESTING GES FUER HALBLEITERPRUEFTECHNIK MBH·Filed 2020·Granted Jan 25, 2022·0 cites·16 claims
1672US11183361B1Charged particle beam device and method for inspecting and/or imaging a sampleICT INTEGRATED CIRCUIT TESTING GES FUER HALBLEITERPRUEFTECHNIK MBH·Filed 2020·Granted Nov 23, 2021·1 cites·19 claims
1769US12412727B2Charged particle beam system, corrector for aberration correction of a charged particle beam, and method thereofICT INTEGRATED CIRCUIT TESTING GES FUER HALBLEITERPRUEFTECHNIK MBH·Filed 2022·Granted Sep 9, 2025·0 cites·22 claims
1866US12562338B2Method of determining an energy spectrum or energy width of a charged particle beam, and charged particle beam imaging deviceICT INTEGRATED CIRCUIT TESTING GES FUER HALBLEITERPRUEFTECHNIK MBH·Filed 2023·Granted Feb 24, 2026·0 cites·20 claims
1966US12542253B2Charged particle optics, charged particle beam apparatus, and method for scanning a charged particle beamICT INTEGRATED CIRCUIT TESTING GES FUER HALBLEITERPRUEFTECHNIK MBH·Filed 2023·Granted Feb 3, 2026·0 cites·19 claims
2064US2025140511A1Method of characterizing a detection path of a charged particle beam and a charged particle mirrorICT INTEGRATED CIRCUIT TESTING GES FUER HALBLEITERPRUEFTECHNIK MBH·Filed 2023·Application pending·0 cites
2163US12451322B2Method of forming a multipole device, method of influencing an electron beam, and multipole deviceICT INTEGRATED CIRCUIT TESTING GES FUER HALBLEITERPRUEFTECHNIK MBH·Filed 2023·Granted Oct 21, 2025·0 cites·13 claims
2263US12386164B2Method of determining a brightness of a charged particle beam, method of determining a size of a source of the charged particle beam, and charged particle beam imaging deviceICT INTEGRATED CIRCUIT TESTING GES FUER HALBLEITERPRUEFTECHNIK MBH·Filed 2022·Granted Aug 12, 2025·0 cites·20 claims
2362US2025182998A1Signal electron beam deflector for an electron beam apparatus, electron beam apparatus and method of deflecting a signal electron beamICT INTEGRATED CIRCUIT TESTING GES FUER HALBLEITERPRUEFTECHNIK MBH·Filed 2023·Application pending·0 cites
2462US2025191874A1Optical system for a plurality of primary beamlets, charged particle multi-beam apparatus and method of focusing a plurality of primary beamletsICT INTEGRATED CIRCUIT TESTING GES FUER HALBLEITERPRUEFTECHNIK MBH·Filed 2023·Application pending·0 cites
2562US2025132121A1Method of operating a charged particle beam apparatus, and charged particle beam apparatusICT INTEGRATED CIRCUIT TESTING GES FUER HALBLEITERPRUEFTECHNIK MBH·Filed 2023·Application pending·0 cites
2661US11469072B2Charged particle beam apparatus, scanning electron microscope, and method of operating a charged particle beam apparatusICT INTEGRATED CIRCUIT TESTING GES FUER HALBLEITERPRUEFTECHNIK MBH·Filed 2021·Granted Oct 11, 2022·0 cites·20 claims
2761US2025087442A1Electron beam apparatus, foil or grid lens, and method of operating an electron beam apparatusICT INTEGRATED CIRCUIT TESTING GES FUER HALBLEITERPRUEFTECHNIK MBH·Filed 2023·Application pending·0 cites
2861US2025104959A1Proximity-electrode, charged particle beam device and method for inspecting and/or imaging a sampleICT INTEGRATED CIRCUIT TESTING GES FUER HALBLEITERPRUEFTECHNIK MBH·Filed 2023·Application pending·0 cites
2961US2026081098A1Charged particle beam device and method for correcting astigmatism and numerical apertureICT INTEGRATED CIRCUIT TESTING GES FUER HALBLEITERPRUEFTECHNIK MBH·Filed 2024·Application pending·0 cites
3060US11791128B2Method of determining the beam convergence of a focused charged particle beam, and charged particle beam systemICT INTEGRATED CIRCUIT TESTING GES FUER HALBLEITERPRUEFTECHNIK MBH·Filed 2021·Granted Oct 17, 2023·0 cites·20 claims
3159US11705301B2Charged particle beam manipulation device and method for manipulating charged particle beamletsICT INTEGRATED CIRCUIT TESTING GES FUER HALBLEITERPRUEFTECHNIK MBH·Filed 2021·Granted Jul 18, 2023·0 cites·15 claims
3259US2025166958A1Deflector for a charged particle beam apparatus, deflecting system, charged particle beam apparatus, and method of fabricating a deflectorICT INTEGRATED CIRCUIT TESTING GES FUER HALBLEITERPRUEFTECHNIK MBH·Filed 2023·Application pending·0 cites
3359US2026018369A1Lens with a scanning system, charged particle beam apparatus, and method of scanning a charged particle beamICT INTEGRATED CIRCUIT TESTING GES FUER HALBLEITERPRUEFTECHNIK MBH·Filed 2024·Application pending·0 cites
3457US10784072B2Aberration-corrected multibeam source, charged particle beam device and method of imaging or illuminating a specimen with an array of primary charged particle beamletsICT INTEGRATED CIRCUIT TESTING GES FUER HALBLEITERPRUEFTECHNIK MBH·Filed 2018·Granted Sep 22, 2020·0 cites·17 claims
3557US2025037965A1Method of determining a beam convergence of a charged particle beam, and charged particle beam systemICT INTEGRATED CIRCUIT TESTING GES FUER HALBLEITERPRUEFTECHNIK MBH·Filed 2023·Application pending·0 cites
3657US2024212968A1Lens for a charged particle beam apparatus, charged particle beam apparatus, and method of focusing a charged particle beamICT INTEGRATED CIRCUIT TESTING GES FUER HALBLEITERPRUEFTECHNIK MBH·Filed 2022·Application pending·0 cites
3756US11810753B2Methods of determining aberrations of a charged particle beam, and charged particle beam systemICT INTEGRATED CIRCUIT TESTING GES FUER HALBLEITERPRUEFTECHNIK MBH·Filed 2021·Granted Nov 7, 2023·0 cites·21 claims
3856US11177114B1Electrode arrangement, contact assembly for an electrode arrangement, charged particle beam device, and method of reducing an electrical field strength in an electrode arrangementICT INTEGRATED CIRCUIT TESTING GES FUER HALBLEITERPRUEFTECHNIK MBH·Filed 2020·Granted Nov 16, 2021·0 cites·20 claims
3956US2026066214A1Apparatus for a charged particle beam device, charged particle beam device, method of analyzing a magnetic lens for a charged particle beam device, and non-transitory mediumICT INTEGRATED CIRCUIT TESTING GES FUER HALBLEITERPRUEFTECHNIK MBH·Filed 2024·Application pending·0 cites
4054US10593509B2Charged particle beam device, multi-beam blanker for a charged particle beam device, and method for operating a charged particle beam deviceICT INTEGRATED CIRCUIT TESTING GES FUER HALBLEITERPRUEFTECHNIK MBH·Filed 2018·Granted Mar 17, 2020·0 cites·22 claims
4154US2026051029A1Method of determining aberrations of a charged particle beam, method of determining cd information, corresponding generation of computational models, and corresponding systemsICT INTEGRATED CIRCUIT TESTING GES FUER HALBLEITERPRUEFTECHNIK MBH·Filed 2024·Application pending·0 cites
4254US2024355576A1Aberration corrector, a charged particle beam apparatus, a method of aligning an aberration corrector and a method of correcting aberration of a charged particle beamICT INTEGRATED CIRCUIT TESTING GES FUER HALBLEITERPRUEFTECHNIK MBH·Filed 2023·Application pending·0 cites
4354US2023197399A1Electron microscope, electron source for electron microscope, and methods of operating an electron microscopeICT INTEGRATED CIRCUIT TESTING GES FUER HALBLEITERPRUEFTECHNIK MBH·Filed 2021·Application pending·0 cites
4454US2024087837A1Magnetic multipole device, charged particle beam apparatus, and method of influencing a charged particle beam propagating along an optical axisICT INTEGRATED CIRCUIT TESTING GES FUER HALBLEITERPRUEFTECHNIK MBH·Filed 2022·Application pending·0 cites
4552US2025125118A1Detector device, electron beam apparatus, and method for inspecting and/or imaging a sampleICT INTEGRATED CIRCUIT TESTING GES FUER HALBLEITERPRUEFTECHNIK MBH·Filed 2023·Application pending·0 cites
4651US12308203B2Methods of determining aberrations of a charged particle beam, and charged particle beam systemICT INTEGRATED CIRCUIT TESTING GES FUER HALBLEITERPRUEFTECHNIK MBH·Filed 2022·Granted May 20, 2025·0 cites·21 claims
4751US11501947B1Aberration corrector and method of aligning aberration correctorICT INTEGRATED CIRCUIT TESTING GES FUER HALBLEITERPRUEFTECHNIK MBH·Filed 2021·Granted Nov 15, 2022·0 cites·20 claims
4851US11257657B2Charged particle beam device with interferometer for height measurementICT INTEGRATED CIRCUIT TESTING GES FUER HALBLEITERPRUEFTECHNIK MBH·Filed 2020·Granted Feb 22, 2022·0 cites·20 claims
4951US10103004B2System and method for imaging a secondary charged particle beam with adaptive secondary charged particle opticsICT INTEGRATED CIRCUIT TESTING GES FUER HALBLEITERPRUEFTECHNIK MBH·Filed 2015·Granted Oct 16, 2018·0 cites·4 claims
5050US11501946B2Method of influencing a charged particle beam, multipole device, and charged particle beam apparatusICT INTEGRATED CIRCUIT TESTING GES FUER HALBLEITERPRUEFTECHNIK MBH·Filed 2021·Granted Nov 15, 2022·0 cites·21 claims

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