Assignee
IMPEDANS LTD
IE·3 granted patents·5 pending applications·3 citations·filing 2013–2024
Top patents by PatentIndex Score
8 records- 0189US11908668B2Apparatus for ion energy analysis of plasma processesIMPEDANS LTD·Filed 2021·Granted Feb 20, 2024·3 cites·18 claims
- 0272US2025054740A1Apparatus for ion energy analysis of plasma processesIMPEDANS LTD·Filed 2024·Application pending·0 cites
- 0366US12399474B2Controller for a matching unit of a plasma processing systemIMPEDANS LTD·Filed 2022·Granted Aug 26, 2025·0 cites·15 claims
- 0465US12136542B2Apparatus for ion energy analysis of plasma processesIMPEDANS LTD·Filed 2022·Granted Nov 5, 2024·0 cites·30 claims
- 0553US2024177965A1Shielded apparatus for ion energy analysis of plasma processesIMPEDANS LTD·Filed 2023·Application pending·0 cites
- 0646US2023305045A1System and method for non-invasive sensing of radio-frequency current spectra flowing in a plasma processing chamberIMPEDANS LTD·Filed 2023·Application pending·0 cites
- 0745US2022196558A1Apparatus and method for sensing rf signals from rf plasma processing equipmentIMPEDANS LTD·Filed 2021·Application pending·0 cites
- 0836US2015276833A1Analysing rf signals from a plasma systemIMPEDANS LTD·Filed 2013·Application pending·0 cites
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