Assignee
INAGAKI YUKIHIKO
JP·5 granted patents·1 pending application·15 citations·filing 2007–2014
Top patents by PatentIndex Score
6 records- 0185US8827621B2Substrate processing apparatus, storage device, and method of transporting substrate storing containerINAGAKI YUKIHIKO·Filed 2011·Granted Sep 9, 2014·9 cites·2 claims
- 0278US9728434B2Substrate processing apparatus, storage device, and method of transporting substrate storing containerINAGAKI YUKIHIKO·Filed 2014·Granted Aug 8, 2017·4 cites·7 claims
- 0365US9566598B2Substrate processing apparatus and substrate processing methodINAGAKI YUKIHIKO·Filed 2013·Granted Feb 14, 2017·1 cites·10 claims
- 0462US9343339B2Coating method and coating apparatusINAGAKI YUKIHIKO·Filed 2012·Granted May 17, 2016·1 cites·4 claims
- 0543US2007267582A1Substrate edge exposure apparatusINAGAKI YUKIHIKO·Filed 2007·Application pending·0 cites
- 0641US9553007B2Coating method and coating apparatusINAGAKI YUKIHIKO·Filed 2012·Granted Jan 24, 2017·0 cites·23 claims
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