Assignee
INFICON INC
US·38 granted patents·15 pending applications·94 citations·filing 2001–2025
Top patents by PatentIndex Score
53 records- 0187US10175198B2System and method for optimal chemical analysisINFICON INC·Filed 2017·Granted Jan 8, 2019·9 cites·20 claims
- 0286US11929270B2Unconsumed precursor monitoringINFICON INC·Filed 2022·Granted Mar 12, 2024·2 cites·22 claims
- 0384US9182378B2High capacity monitor crystal exchanger utilizing an organized 3-D storage structureINFICON INC·Filed 2013·Granted Nov 10, 2015·5 cites·39 claims
- 0479USD978662SSensor packageINFICON INC·Filed 2020·Granted Feb 21, 2023·13 cites·1 claims
- 0579US11335575B2Unconsumed precursor monitoringINFICON INC·Filed 2018·Granted May 17, 2022·4 cites·22 claims
- 0678US10502651B2Creating a mini environment for gas analysisINFICON INC·Filed 2016·Granted Dec 10, 2019·3 cites·26 claims
- 0777US10047437B2Process gas management system and photoionization detectorINFICON INC·Filed 2016·Granted Aug 14, 2018·1 cites·19 claims
- 0875US11841354B2Method for displaying concentration data of a substance and an associated apparatusINFICON INC·Filed 2019·Granted Dec 12, 2023·1 cites·15 claims
- 0975US10704150B2Monitoring thin film depositionINFICON INC·Filed 2014·Granted Jul 7, 2020·1 cites·7 claims
- 1074US12276649B2Method for displaying concentration data of a substance and an associated apparatusINFICON INC·Filed 2023·Granted Apr 15, 2025·0 cites·13 claims
- 1173US7041984B2Replaceable anode liner for ion sourceINFICON INC·Filed 2004·Granted May 9, 2006·11 cites·35 claims
- 1272US9645125B2Vacuum chamber measurement using residual gas analyzerINFICON INC·Filed 2013·Granted May 9, 2017·3 cites·20 claims
- 1372US7257494B2Inter-process sensing of wafer outcomeINFICON INC·Filed 2005·Granted Aug 14, 2007·7 cites·14 claims
- 1467US11784031B2Method of detecting radicals using mass spectrometryINFICON INC·Filed 2022·Granted Oct 10, 2023·0 cites·11 claims
- 1567US10755909B2Chemical analysis device and methodINFICON INC·Filed 2019·Granted Aug 25, 2020·1 cites·20 claims
- 1665US2025369866A1Particle detectorINFICON INC·Filed 2025·Application pending·0 cites
- 1765US2025285855A1Multiple flow path gas inlet with integrated heating and temperature controlINFICON INC·Filed 2025·Application pending·0 cites
- 1863US7821250B2RF sensor clamp assemblyINFICON INC·Filed 2006·Granted Oct 26, 2010·4 cites·28 claims
- 1962US12227846B2Monitoring thin film depositionINFICON INC·Filed 2020·Granted Feb 18, 2025·0 cites·6 claims
- 2062US11569079B2Gas analyzer and membranes thereforINFICON INC·Filed 2021·Granted Jan 31, 2023·0 cites·24 claims
- 2162US9506895B2Combined crystal retainer and contact system for deposition monitor sensorsINFICON INC·Filed 2013·Granted Nov 29, 2016·1 cites·19 claims
- 2262US7538562B2High performance miniature RF sensor for use in microelectronics plasma processing toolsINFICON INC·Filed 2007·Granted May 26, 2009·6 cites·21 claims
- 2362US2025290778A1Metalized plastic heat shield enclosure for heated inlet manifoldINFICON INC·Filed 2025·Application pending·0 cites
- 2461US2025093310A1Method and system for injecting an internal standard into a portable gas analyzer system and an associated reusable sample cartridgeINFICON INC·Filed 2024·Application pending·0 cites
- 2560US12494358B2Ion source assembly with multiple elliptical filamentsINFICON INC·Filed 2022·Granted Dec 9, 2025·0 cites·17 claims
- 2660US11282687B2Chemical analysis device and methodINFICON INC·Filed 2020·Granted Mar 22, 2022·0 cites·20 claims
- 2760US2024402128A1Qcm sensorINFICON INC·Filed 2024·Application pending·0 cites
- 2858US6642641B2Apparatus for measuring total pressure and partial pressure with common electron beamINFICON INC·Filed 2001·Granted Nov 4, 2003·4 cites·19 claims
- 2957US12198897B2HTCC antenna for generation of microplasmaINFICON INC·Filed 2021·Granted Jan 14, 2025·0 cites·23 claims
- 3057US12106953B2Wide range electron impact ion source for a mass spectrometerINFICON INC·Filed 2022·Granted Oct 1, 2024·0 cites·16 claims
- 3157US10985000B2Chemical analyzer with membraneINFICON INC·Filed 2018·Granted Apr 20, 2021·0 cites·18 claims
- 3256US6476612B1Louvered beam stop for lowering x-ray limit of a total pressure gaugeINFICON INC·Filed 2001·Granted Nov 5, 2002·3 cites·10 claims
- 3355US2016225597A1Chemical analyzer with membraneINFICON INC·Filed 2014·Application pending·0 cites
- 3454US6991110B2Package for storing sensor crystals and related method of useINFICON INC·Filed 2003·Granted Jan 31, 2006·7 cites·16 claims
- 3553US11658020B2Ion source assembly with multiple ionization volumes for use in a mass spectrometerINFICON INC·Filed 2021·Granted May 23, 2023·0 cites·18 claims
- 3651US12577675B2System and method for mass flow measurement and control of process gases in a carrier stream using one or more quartz crystal microbalance sensorsINFICON INC·Filed 2022·Granted Mar 17, 2026·0 cites·19 claims
- 3751US6906799B2Signal processing method for in-situ, scanned-beam particle monitoringINFICON INC·Filed 2002·Granted Jun 14, 2005·6 cites·33 claims
- 3851US2026005074A1Real-time computer vision end-point detection pipelineINFICON INC·Filed 2025·Application pending·0 cites
- 3950US11175323B2Process monitoring using crystal with reactance sensorINFICON INC·Filed 2017·Granted Nov 16, 2021·0 cites·17 claims
- 4049US2024242141A1Method of optimizing equipment maintenance and associated systemINFICON INC·Filed 2022·Application pending·0 cites
- 4149US2024329001A1Quartz crystal microbalance (qcm) sensor having rapid registration responseINFICON INC·Filed 2022·Application pending·0 cites
- 4249US2024241083A1System and method for deconvolution of real-time mass from the influence of temperature and pressure on crystal microbalanceINFICON INC·Filed 2022·Application pending·0 cites
- 4348US11875984B2Time-of-flight mass spectrometer assembly with a secondary flangeINFICON INC·Filed 2022·Granted Jan 16, 2024·0 cites·19 claims
- 4448US8916822B2Dual-detection residual gas analyzerINFICON INC·Filed 2013·Granted Dec 23, 2014·0 cites·20 claims
- 4548US7728250B2RF sensor clamp assemblyINFICON INC·Filed 2004·Granted Jun 1, 2010·2 cites·48 claims
- 4646US9217663B2Multi-chambered acoustic sensor for determination gas compositionINFICON INC·Filed 2012·Granted Dec 22, 2015·0 cites·14 claims
- 4743US12347667B2Method of auto tuning one or more sensorsINFICON INC·Filed 2023·Granted Jul 1, 2025·0 cites·14 claims
- 4843US12266552B2System and method for monitoring semiconductor processesINFICON INC·Filed 2021·Granted Apr 1, 2025·0 cites·26 claims
- 4941US2024183446A1Sealing system for components of a gas analyzerINFICON INC·Filed 2022·Application pending·0 cites
- 5041US2024153753A1Atmospheric pressure ionization coupled to an electron ionization mass spectrometerINFICON INC·Filed 2023·Application pending·0 cites
Showing the top 50 of 53 patent records by PatentIndex Score.
Counts cover granted patents and pending applications in the PatentIndex corpus. How scoring works →