Assignee
INFINEON TECHNOLOGIES SC300
DE·18 granted patents·176 citations·filing 2001–2003
Top patents by PatentIndex Score
18 records- 0185US6877944B2Configuration for transporting a semiconductor wafer carrierINFINEON TECHNOLOGIES SC300·Filed 2003·Granted Apr 12, 2005·44 cites·19 claims
- 0275US6739013B2Wafer cleaning apparatusINFINEON TECHNOLOGIES SC300·Filed 2001·Granted May 25, 2004·22 cites·9 claims
- 0367US6745637B2Self-supporting adaptable metrology deviceINFINEON TECHNOLOGIES SC300·Filed 2002·Granted Jun 8, 2004·13 cites·22 claims
- 0464US6767170B2Wafer handling system and wafer handling methodINFINEON TECHNOLOGIES SC300·Filed 2002·Granted Jul 27, 2004·18 cites·18 claims
- 0563US6824456B2Configuration for polishing disk-shaped objectsINFINEON TECHNOLOGIES SC300·Filed 2003·Granted Nov 30, 2004·10 cites·20 claims
- 0661US6802712B2Heating system, method for heating a deposition or oxidation reactor, and reactor including the heating systemINFINEON TECHNOLOGIES SC300·Filed 2003·Granted Oct 12, 2004·11 cites·11 claims
- 0760US6791074B2Light curtain system for establishing a protective light curtain, tool and system for processing objects and method for loading/unloading a toolINFINEON TECHNOLOGIES SC300·Filed 2002·Granted Sep 14, 2004·10 cites·29 claims
- 0858US6593254B2Method for clamping a semiconductor device in a manufacturing processINFINEON TECHNOLOGIES SC300·Filed 2002·Granted Jul 15, 2003·9 cites·9 claims
- 0957US6806008B2Method for adjusting a temperature in a resist processINFINEON TECHNOLOGIES SC300·Filed 2002·Granted Oct 19, 2004·6 cites·5 claims
- 1055US6794635B2Apparatus and method for detecting an amount of depolarization of a linearly polarized beamINFINEON TECHNOLOGIES SC300·Filed 2003·Granted Sep 21, 2004·5 cites·17 claims
- 1155US6663674B2Method of handling a silicon waferINFINEON TECHNOLOGIES SC300·Filed 2002·Granted Dec 16, 2003·8 cites·7 claims
- 1254US6887722B2Method for exposing a semiconductor waferINFINEON TECHNOLOGIES SC300·Filed 2003·Granted May 3, 2005·6 cites·7 claims
- 1348US6857841B2Vehicle for transporting a semiconductor device carrier to a semiconductor processing toolINFINEON TECHNOLOGIES SC300·Filed 2003·Granted Feb 22, 2005·3 cites·6 claims
- 1443US6784553B2Semiconductor device with self-aligned contact and method for manufacturing the deviceINFINEON TECHNOLOGIES SC300·Filed 2002·Granted Aug 31, 2004·2 cites·6 claims
- 1540US6909932B2Method for wafer position data retrieval in semiconductor wafer manufacturingINFINEON TECHNOLOGIES SC300·Filed 2003·Granted Jun 21, 2005·5 cites·11 claims
- 1640US6887026B1Semiconductor product container and system for handling a semiconductor product containerINFINEON TECHNOLOGIES SC300·Filed 2003·Granted May 3, 2005·3 cites·18 claims
- 1738US6881914B2Apparatus and method for handling, storing and reloading carriers for disk-shaped items, such as semiconductor wafers or CDsINFINEON TECHNOLOGIES SC300·Filed 2002·Granted Apr 19, 2005·1 cites·11 claims
- 1831US6996479B2Method and apparatus for measuring and controlling the water content of a water-containing liquid mixtureINFINEON TECHNOLOGIES SC300·Filed 2003·Granted Feb 7, 2006·0 cites·26 claims
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Counts cover granted patents and pending applications in the PatentIndex corpus. How scoring works →