Assignee
INNOVATIVE MICRO TECH
US·19 granted patents·24 pending applications·19 citations·filing 2015–2021
Top patents by PatentIndex Score
43 records- 0190US10388468B2Contact material for MEMS devicesINNOVATIVE MICRO TECH·Filed 2016·Granted Aug 20, 2019·5 cites·20 claims
- 0290US9608731B2Microfabricated optical apparatusINNOVATIVE MICRO TECH·Filed 2015·Granted Mar 28, 2017·5 cites·6 claims
- 0385US10291332B2Self-aligned silicon fiber optic connectorINNOVATIVE MICRO TECH·Filed 2018·Granted May 14, 2019·4 cites·31 claims
- 0481US11305982B2Eight spring dual substrate MEMS plate switch and method of manufactureINNOVATIVE MICRO TECH·Filed 2019·Granted Apr 19, 2022·2 cites·18 claims
- 0581US10011478B2Thermocompression bonding with raised featureINNOVATIVE MICRO TECH·Filed 2017·Granted Jul 3, 2018·1 cites·10 claims
- 0669US9953787B2Dual substrate electrostatic MEMS switch with multiple hinges and method of manufactureINNOVATIVE MICRO TECH·Filed 2016·Granted Apr 24, 2018·1 cites·11 claims
- 0768US9950923B1Method for making vias using a doped substrateINNOVATIVE MICRO TECH·Filed 2017·Granted Apr 24, 2018·1 cites·10 claims
- 0866US11502669B2Subterahertz microfabricated spectrometerINNOVATIVE MICRO TECH·Filed 2020·Granted Nov 15, 2022·0 cites·20 claims
- 0964US2019341211A1Contact surface for mems deviceINNOVATIVE MICRO TECH·Filed 2019·Application pending·0 cites
- 1062US11594389B2MEMS dual substrate switch with magnetic actuationINNOVATIVE MICRO TECH·Filed 2021·Granted Feb 28, 2023·0 cites·10 claims
- 1162US11309837B2Resonant filter using mm wave cavityINNOVATIVE MICRO TECH·Filed 2020·Granted Apr 19, 2022·0 cites·13 claims
- 1260US11258425B2Microfabricated notch filterINNOVATIVE MICRO TECH·Filed 2020·Granted Feb 22, 2022·0 cites·23 claims
- 1358US10955336B2Gas sensor comprising a rotatable Fabry-Perot multilayer etalonINNOVATIVE MICRO TECH·Filed 2018·Granted Mar 23, 2021·0 cites·17 claims
- 1458US2018075994A1Contact surface for mems deviceINNOVATIVE MICRO TECH·Filed 2017·Application pending·0 cites
- 1556US10302871B2Microfabricated fiber optic platformINNOVATIVE MICRO TECH·Filed 2018·Granted May 28, 2019·0 cites·22 claims
- 1653US10050409B2Microfabricated optical apparatus with grounded metal layerINNOVATIVE MICRO TECH·Filed 2018·Granted Aug 14, 2018·0 cites·20 claims
- 1752US10804850B2Gas sensor using mm wave cavityINNOVATIVE MICRO TECH·Filed 2018·Granted Oct 13, 2020·0 cites·19 claims
- 1850US2017126323A1Microfabricated optical apparatusINNOVATIVE MICRO TECH·Filed 2017·Application pending·0 cites
- 1949US10826153B2Resonant filter using mm wave cavityINNOVATIVE MICRO TECH·Filed 2019·Granted Nov 3, 2020·0 cites·12 claims
- 2049US10017381B2Microfabricated pressure transducerINNOVATIVE MICRO TECH·Filed 2017·Granted Jul 10, 2018·0 cites·20 claims
- 2149US9533877B2Anodic bonding of dielectric substratesINNOVATIVE MICRO TECH·Filed 2016·Granted Jan 3, 2017·0 cites·19 claims
- 2247US2019064061A1Gas sensor using vcselINNOVATIVE MICRO TECH·Filed 2018·Application pending·0 cites
- 2346US2021020386A1Mems magnetic switch with permeable featuresINNOVATIVE MICRO TECH·Filed 2020·Application pending·0 cites
- 2445US2019333728A1Shielded dual substrate mems plate switch and method of manufactureINNOVATIVE MICRO TECH·Filed 2019·Application pending·0 cites
- 2545US2019382260A1Low cost wafer bonding methodINNOVATIVE MICRO TECH·Filed 2019·Application pending·0 cites
- 2644US2019221607A1Microfabricated device with piezoelectric substrate and method of manufactureINNOVATIVE MICRO TECH·Filed 2019·Application pending·0 cites
- 2743US2018180829A1Microfabricated optical apparatus with flexible electrical connectorINNOVATIVE MICRO TECH·Filed 2018·Application pending·0 cites
- 2842US9493877B1Etching technique for microfabrication substratesINNOVATIVE MICRO TECH·Filed 2016·Granted Nov 15, 2016·0 cites·1 claims
- 2942US2018010589A1Microfabricated fluid pumpINNOVATIVE MICRO TECH·Filed 2017·Application pending·0 cites
- 3042US2019137611A1Scanning optical beam sourceINNOVATIVE MICRO TECH·Filed 2018·Application pending·0 cites
- 3141US2018124913A1Rf interconnectINNOVATIVE MICRO TECH·Filed 2017·Application pending·0 cites
- 3240US2019066937A1Mems dual substrate switch with magnetic actuationINNOVATIVE MICRO TECH·Filed 2018·Application pending·0 cites
- 3338US2018079640A1Mems device with offset electrodeINNOVATIVE MICRO TECH·Filed 2017·Application pending·0 cites
- 3438US2019088598A1Method for forming through substrate vias in a trenchINNOVATIVE MICRO TECH·Filed 2017·Application pending·0 cites
- 3538US2017062165A1Device with separation limiting standoffINNOVATIVE MICRO TECH·Filed 2016·Application pending·0 cites
- 3637US2017237228A1Microfabricated optical apparatusINNOVATIVE MICRO TECH·Filed 2016·Application pending·0 cites
- 3737US2016343684A1Thermocompression bonding with raised featureINNOVATIVE MICRO TECH·Filed 2016·Application pending·0 cites
- 3836US2018175276A1Microfabricated self-sensing actuatorINNOVATIVE MICRO TECH·Filed 2016·Application pending·0 cites
- 3936US2018155184A1Bondline for mm-wave applicationsINNOVATIVE MICRO TECH·Filed 2017·Application pending·0 cites
- 4035US2019304794A1Method for etching shapes into siliconINNOVATIVE MICRO TECH·Filed 2019·Application pending·0 cites
- 4135US2017062159A1Mems reed switch deviceINNOVATIVE MICRO TECH·Filed 2016·Application pending·0 cites
- 4233US2017146793A1Microfabricated optical apparatus with integrated turning surfaceINNOVATIVE MICRO TECH·Filed 2016·Application pending·0 cites
- 4330US2017217767A1Through substrate vias using solder bumpsINNOVATIVE MICRO TECH·Filed 2017·Application pending·0 cites
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