Assignee
INNOVATIVE MICRO TECHNOLOGY
US·47 granted patents·11 pending applications·674 citations·filing 2001–2015
Top patents by PatentIndex Score
58 records- 0197US7220594B2Method and apparatus for sorting particles with a MEMS deviceINNOVATIVE MICRO TECHNOLOGY·Filed 2005·Granted May 22, 2007·76 cites·20 claims
- 0294US7210352B2MEMS teeter-totter apparatus with curved beam and method of manufactureINNOVATIVE MICRO TECHNOLOGY·Filed 2005·Granted May 1, 2007·33 cites·20 claims
- 0393US7229838B2MEMS actuator and method of manufacture for MEMS particle sorting deviceINNOVATIVE MICRO TECHNOLOGY·Filed 2005·Granted Jun 12, 2007·47 cites·24 claims
- 0492US9302905B1Method for forming a microfabricated structureINNOVATIVE MICRO TECHNOLOGY·Filed 2015·Granted Apr 5, 2016·15 cites·19 claims
- 0592US7548145B2Hysteretic MEMS thermal device and method of manufactureINNOVATIVE MICRO TECHNOLOGY·Filed 2006·Granted Jun 16, 2009·19 cites·25 claims
- 0692US6838056B2Method and apparatus for sorting biological cells with a MEMS deviceINNOVATIVE MICRO TECHNOLOGY·Filed 2002·Granted Jan 4, 2005·107 cites·9 claims
- 0791US9156679B1Method and device using silicon substrate to glass substrate anodic bondingINNOVATIVE MICRO TECHNOLOGY·Filed 2014·Granted Oct 13, 2015·11 cites·23 claims
- 0890US7528691B2Dual substrate electrostatic MEMS switch with hermetic seal and method of manufactureINNOVATIVE MICRO TECHNOLOGY·Filed 2005·Granted May 5, 2009·32 cites·20 claims
- 0989US7972683B2Wafer bonding material with embedded conductive particlesINNOVATIVE MICRO TECHNOLOGY·Filed 2007·Granted Jul 5, 2011·21 cites·20 claims
- 1089US7264972B2Method and apparatus for sorting biological cells with a MEMS deviceINNOVATIVE MICRO TECHNOLOGY·Filed 2004·Granted Sep 4, 2007·69 cites·33 claims
- 1188US7893798B2Dual substrate MEMS plate switch and method of manufactureINNOVATIVE MICRO TECHNOLOGY·Filed 2007·Granted Feb 22, 2011·18 cites·23 claims
- 1287US7141080B2Method and apparatus for assembling an array of micro-devicesINNOVATIVE MICRO TECHNOLOGY·Filed 2005·Granted Nov 28, 2006·11 cites·19 claims
- 1386US7675162B2Interconnect structure using through wafer vias and method of fabricationINNOVATIVE MICRO TECHNOLOGY·Filed 2006·Granted Mar 9, 2010·17 cites·24 claims
- 1485US7462931B2Indented structure for encapsulated devices and method of manufactureINNOVATIVE MICRO TECHNOLOGY·Filed 2006·Granted Dec 9, 2008·12 cites·16 claims
- 1585US7233048B2MEMS device trench plating process and apparatus for through hole viasINNOVATIVE MICRO TECHNOLOGY·Filed 2005·Granted Jun 19, 2007·17 cites·19 claims
- 1684US7864006B2MEMS plate switch and method of manufactureINNOVATIVE MICRO TECHNOLOGY·Filed 2008·Granted Jan 4, 2011·15 cites·25 claims
- 1782US7785913B2System and method for forming moveable features on a composite substrateINNOVATIVE MICRO TECHNOLOGY·Filed 2006·Granted Aug 31, 2010·11 cites·10 claims
- 1882US7582969B2Hermetic interconnect structure and method of manufactureINNOVATIVE MICRO TECHNOLOGY·Filed 2005·Granted Sep 1, 2009·11 cites·18 claims
- 1982US7569926B2Wafer level hermetic bond using metal alloy with raised featureINNOVATIVE MICRO TECHNOLOGY·Filed 2005·Granted Aug 4, 2009·12 cites·19 claims
- 2079US7687304B2Current-driven device using NiMn alloy and method of manufactureINNOVATIVE MICRO TECHNOLOGY·Filed 2006·Granted Mar 30, 2010·3 cites·20 claims
- 2178US7960208B2Wafer level hermetic bond using metal alloy with raised featureINNOVATIVE MICRO TECHNOLOGY·Filed 2009·Granted Jun 14, 2011·8 cites·21 claims
- 2277US7968986B2Lid structure for microdevice and method of manufactureINNOVATIVE MICRO TECHNOLOGY·Filed 2007·Granted Jun 28, 2011·8 cites·9 claims
- 2376US6351201B1Microelectromechanical switch with braking algorithmINNOVATIVE MICRO TECHNOLOGY·Filed 2001·Granted Feb 26, 2002·19 cites·17 claims
- 2473US7724121B2Singly attached MEMS thermal device and method of manufactureINNOVATIVE MICRO TECHNOLOGY·Filed 2006·Granted May 25, 2010·6 cites·20 claims
- 2573US7688167B2Contact electrode for microdevices and etch method of manufactureINNOVATIVE MICRO TECHNOLOGY·Filed 2006·Granted Mar 30, 2010·7 cites·20 claims
- 2673US7550778B2System and method for providing access to an encapsulated deviceINNOVATIVE MICRO TECHNOLOGY·Filed 2006·Granted Jun 23, 2009·4 cites·16 claims
- 2772US6812061B1Method and apparatus for assembling an array of micro-devicesINNOVATIVE MICRO TECHNOLOGY·Filed 2001·Granted Nov 2, 2004·14 cites·15 claims
- 2871US7812703B2MEMS device using NiMn alloy and method of manufactureINNOVATIVE MICRO TECHNOLOGY·Filed 2006·Granted Oct 12, 2010·6 cites·20 claims
- 2966US7807547B2Wafer bonding material with embedded rigid particlesINNOVATIVE MICRO TECHNOLOGY·Filed 2006·Granted Oct 5, 2010·3 cites·13 claims
- 3066US7057245B2Method and apparatus for assembling an array of micro-devicesINNOVATIVE MICRO TECHNOLOGY·Filed 2004·Granted Jun 6, 2006·10 cites·16 claims
- 3165US8343791B2Plating process and apparatus for through wafer featuresINNOVATIVE MICRO TECHNOLOGY·Filed 2010·Granted Jan 1, 2013·1 cites·13 claims
- 3265US6831380B2Low inertia latching microactuatorINNOVATIVE MICRO TECHNOLOGY·Filed 2001·Granted Dec 14, 2004·14 cites·24 claims
- 3364US9315375B2Method using glass substrate anodic bondingINNOVATIVE MICRO TECHNOLOGY·Filed 2013·Granted Apr 19, 2016·0 cites·19 claims
- 3464US6593749B2Wafer level method for probing micromechanical devicesINNOVATIVE MICRO TECHNOLOGY·Filed 2001·Granted Jul 15, 2003·10 cites·16 claims
- 3563US9162878B2Wafer level hermetic bond using metal alloy with raised feature and wetting layerINNOVATIVE MICRO TECHNOLOGY·Filed 2014·Granted Oct 20, 2015·1 cites·20 claims
- 3663US7713786B2Etching/bonding chamber for encapsulated devices and method of useINNOVATIVE MICRO TECHNOLOGY·Filed 2007·Granted May 11, 2010·2 cites·17 claims
- 3760US7944113B2Hysteretic MEMS thermal device and method of manufactureINNOVATIVE MICRO TECHNOLOGY·Filed 2009·Granted May 17, 2011·2 cites·14 claims
- 3858US7276991B2Multiple switch MEMS structure and method of manufactureINNOVATIVE MICRO TECHNOLOGY·Filed 2005·Granted Oct 2, 2007·2 cites·20 claims
- 3953US7759218B2Indented lid for encapsulated devices and method of manufactureINNOVATIVE MICRO TECHNOLOGY·Filed 2008·Granted Jul 20, 2010·0 cites·19 claims
- 4052US9388037B2Device using glass substrate anodic bondingINNOVATIVE MICRO TECHNOLOGY·Filed 2014·Granted Jul 12, 2016·0 cites·19 claims
- 4152US2008318349A1Wafer level hermetic bond using metal alloyINNOVATIVE MICRO TECHNOLOGY·Filed 2008·Application pending·0 cites
- 4251US7759152B2MEMS thermal actuator and method of manufactureINNOVATIVE MICRO TECHNOLOGY·Filed 2009·Granted Jul 20, 2010·0 cites·11 claims
- 4350US9330874B2Solder bump sealing method and deviceINNOVATIVE MICRO TECHNOLOGY·Filed 2014·Granted May 3, 2016·0 cites·18 claims
- 4449US7626311B2Hysteretic MEMS two-dimensional thermal device and method of manufactureINNOVATIVE MICRO TECHNOLOGY·Filed 2007·Granted Dec 1, 2009·0 cites·11 claims
- 4549US2006278942A1Antistiction MEMS substrate and method of manufactureINNOVATIVE MICRO TECHNOLOGY·Filed 2005·Application pending·0 cites
- 4648US7622783B2MEMS thermal actuator and method of manufactureINNOVATIVE MICRO TECHNOLOGY·Filed 2007·Granted Nov 24, 2009·0 cites·16 claims
- 4744US2009001537A1Gettering material for encapsulated microdevices and method of manufactureINNOVATIVE MICRO TECHNOLOGY·Filed 2007·Application pending·0 cites
- 4844US2016093530A1Method for forming through substrate viasINNOVATIVE MICRO TECHNOLOGY·Filed 2014·Application pending·0 cites
- 4943US7533792B2Elastic interface for wafer bonding apparatusINNOVATIVE MICRO TECHNOLOGY·Filed 2006·Granted May 19, 2009·0 cites·16 claims
- 5043US2006266692A1Microfabricated cross flow filter and method of manufactureINNOVATIVE MICRO TECHNOLOGY·Filed 2005·Application pending·0 cites
Showing the top 50 of 58 patent records by PatentIndex Score.
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