Assignee
INTEGRATED CIRCUIT TESTING
DE·83 granted patents·7 pending applications·1,510 citations·filing 1985–2015
Top patents by PatentIndex Score
90 records- 0198US9035249B1Multi-beam system for high throughput EBIINTEGRATED CIRCUIT TESTING·Filed 2014·Granted May 19, 2015·83 cites·20 claims
- 0298US8378299B2Twin beam charged particle column and method of operating thereofINTEGRATED CIRCUIT TESTING·Filed 2011·Granted Feb 19, 2013·62 cites·16 claims
- 0398US7274018B2Charged particle beam apparatus and method for operating the sameINTEGRATED CIRCUIT TESTING·Filed 2006·Granted Sep 25, 2007·162 cites·10 claims
- 0498US7045781B2Charged particle beam apparatus and method for operating the sameINTEGRATED CIRCUIT TESTING·Filed 2004·Granted May 16, 2006·214 cites·19 claims
- 0597US7544937B2Charged particle beam device for high spatial resolution and multiple perspective imagingINTEGRATED CIRCUIT TESTING·Filed 2006·Granted Jun 9, 2009·37 cites·31 claims
- 0697US6943349B2Multi beam charged particle deviceINTEGRATED CIRCUIT TESTING·Filed 2001·Granted Sep 13, 2005·126 cites·28 claims
- 0796US4926054AObjective lens for focusing charged particles in an electron microscopeINTEGRATED CIRCUIT TESTING·Filed 1989·Granted May 15, 1990·85 cites·8 claims
- 0895US7692165B2Charged particle beam device with a gas field ion source and a gas supply systemINTEGRATED CIRCUIT TESTING·Filed 2007·Granted Apr 6, 2010·25 cites·20 claims
- 0995US7335894B2High current density particle beam systemINTEGRATED CIRCUIT TESTING·Filed 2005·Granted Feb 26, 2008·40 cites·27 claims
- 1092US7652263B2Focussing lens for charged particle beamsINTEGRATED CIRCUIT TESTING·Filed 2005·Granted Jan 26, 2010·18 cites·23 claims
- 1192US7633074B2Arrangement and method for compensating emitter tip vibrationsINTEGRATED CIRCUIT TESTING·Filed 2006·Granted Dec 15, 2009·15 cites·95 claims
- 1292US7253417B2Multi-axis compound lens, beam system making use of the compound lens, and method using the compound lensINTEGRATED CIRCUIT TESTING·Filed 2003·Granted Aug 7, 2007·39 cites·28 claims
- 1390US7439500B2Analyzing system and charged particle beam deviceINTEGRATED CIRCUIT TESTING·Filed 2006·Granted Oct 21, 2008·12 cites·27 claims
- 1490US6730907B1Charged particle deviceINTEGRATED CIRCUIT TESTING·Filed 2000·Granted May 4, 2004·33 cites·19 claims
- 1589US7501638B1Charged particle beam emitting device and method for operating a charged particle beam emitting deviceINTEGRATED CIRCUIT TESTING·Filed 2006·Granted Mar 10, 2009·16 cites·27 claims
- 1688US9245709B1Charged particle beam specimen inspection system and method for operation thereofINTEGRATED CIRCUIT TESTING·Filed 2014·Granted Jan 26, 2016·7 cites·20 claims
- 1788US7465939B2Aberration correction device and method for operating sameINTEGRATED CIRCUIT TESTING·Filed 2005·Granted Dec 16, 2008·10 cites·32 claims
- 1888US6936817B2Optical column for charged particle beam deviceINTEGRATED CIRCUIT TESTING·Filed 2001·Granted Aug 30, 2005·27 cites·9 claims
- 1987US7326927B2Focusing lens and charged particle beam device for titled landing angle operationINTEGRATED CIRCUIT TESTING·Filed 2005·Granted Feb 5, 2008·9 cites·55 claims
- 2086US7696489B2Emitter for an ion source and method of producing sameINTEGRATED CIRCUIT TESTING·Filed 2006·Granted Apr 13, 2010·25 cites·24 claims
- 2186US7595490B2Charged particle beam emitting device and method for operating a charged particle beam emitting deviceINTEGRATED CIRCUIT TESTING·Filed 2006·Granted Sep 29, 2009·10 cites·36 claims
- 2285US8921804B2High brightness electron gun with moving condenser lensINTEGRATED CIRCUIT TESTING·Filed 2012·Granted Dec 30, 2014·6 cites·18 claims
- 2384US7586093B2Apparatus and method for inspecting a sample of a specimen by means of an electron beamINTEGRATED CIRCUIT TESTING·Filed 2004·Granted Sep 8, 2009·19 cites·24 claims
- 2484US6943507B2Device and method for controlling focussed electron beamsINTEGRATED CIRCUIT TESTING·Filed 2002·Granted Sep 13, 2005·19 cites·36 claims
- 2584US5041724AMethod of operating an electron beam measuring deviceINTEGRATED CIRCUIT TESTING·Filed 1989·Granted Aug 20, 1991·29 cites·13 claims
- 2683US7968855B2Dual mode gas field ion sourceINTEGRATED CIRCUIT TESTING·Filed 2009·Granted Jun 28, 2011·6 cites·25 claims
- 2783US7932495B2Fast wafer inspection systemINTEGRATED CIRCUIT TESTING·Filed 2008·Granted Apr 26, 2011·6 cites·22 claims
- 2883US7589328B2Gas field ION source for multiple applicationsINTEGRATED CIRCUIT TESTING·Filed 2007·Granted Sep 15, 2009·6 cites·30 claims
- 2983US7429740B2Electric-magnetic field-generating element and assembling method for sameINTEGRATED CIRCUIT TESTING·Filed 2006·Granted Sep 30, 2008·8 cites·28 claims
- 3082US7829870B2Method and apparatus for in-situ sample preparationINTEGRATED CIRCUIT TESTING·Filed 2007·Granted Nov 9, 2010·6 cites·9 claims
- 3181US8957390B2Electron gun arrangementINTEGRATED CIRCUIT TESTING·Filed 2014·Granted Feb 17, 2015·4 cites·20 claims
- 3281US7939800B2Arrangement and method for compensating emitter tip vibrationsINTEGRATED CIRCUIT TESTING·Filed 2008·Granted May 10, 2011·5 cites·28 claims
- 3381US5422486AScanning electron beam deviceINTEGRATED CIRCUIT TESTING·Filed 1993·Granted Jun 6, 1995·47 cites·7 claims
- 3480US7928403B2Multiple lens assembly and charged particle beam device comprising the sameINTEGRATED CIRCUIT TESTING·Filed 2005·Granted Apr 19, 2011·5 cites·29 claims
- 3580US7663102B2High current density particle beam systemINTEGRATED CIRCUIT TESTING·Filed 2005·Granted Feb 16, 2010·5 cites·34 claims
- 3680US7629578B2Charged particle beam deviceINTEGRATED CIRCUIT TESTING·Filed 2007·Granted Dec 8, 2009·5 cites·42 claims
- 3780US7075075B2Charged particle deflecting systemINTEGRATED CIRCUIT TESTING·Filed 2004·Granted Jul 11, 2006·16 cites·43 claims
- 3879US7851768B2Ultra high precision measurement tool with control loopINTEGRATED CIRCUIT TESTING·Filed 2008·Granted Dec 14, 2010·4 cites·19 claims
- 3979US6825476B2Column for a charged particle beam deviceINTEGRATED CIRCUIT TESTING·Filed 2001·Granted Nov 30, 2004·14 cites·24 claims
- 4078US7982179B2Beam current calibration systemINTEGRATED CIRCUIT TESTING·Filed 2009·Granted Jul 19, 2011·4 cites·23 claims
- 4178US6747279B2Objective lens for a charged particle beam deviceINTEGRATED CIRCUIT TESTING·Filed 2001·Granted Jun 8, 2004·13 cites·26 claims
- 4277US7847266B2Device and method for selecting an emission area of an emission patternINTEGRATED CIRCUIT TESTING·Filed 2006·Granted Dec 7, 2010·4 cites·40 claims
- 4376US8049180B2Achromatic mass separatorINTEGRATED CIRCUIT TESTING·Filed 2007·Granted Nov 1, 2011·4 cites·23 claims
- 4476US8044370B2Gas ion source with high mechanical stabilityINTEGRATED CIRCUIT TESTING·Filed 2008·Granted Oct 25, 2011·6 cites·15 claims
- 4576US8044368B2Lens coil cooling of a magnetic lensINTEGRATED CIRCUIT TESTING·Filed 2008·Granted Oct 25, 2011·3 cites·19 claims
- 4676US7659514B2Asymmetric annular detectorINTEGRATED CIRCUIT TESTING·Filed 2007·Granted Feb 9, 2010·3 cites·16 claims
- 4774US8373136B2Achromatic beam deflector, achromatic beam separator, charged particle device, method of operating an achromatic beam deflector, and method of operating an achromatic beam separatorINTEGRATED CIRCUIT TESTING·Filed 2009·Granted Feb 12, 2013·3 cites·22 claims
- 4874US7928405B2Magnetic lens assemblyINTEGRATED CIRCUIT TESTING·Filed 2008·Granted Apr 19, 2011·4 cites·20 claims
- 4974US5329125ADevice for corpuscular-optical examination and/or processing of material samplesINTEGRATED CIRCUIT TESTING·Filed 1992·Granted Jul 12, 1994·26 cites·5 claims
- 5072US7919749B2Energy filter for cold field emission electron beam apparatusINTEGRATED CIRCUIT TESTING·Filed 2008·Granted Apr 5, 2011·2 cites·25 claims
Showing the top 50 of 90 patent records by PatentIndex Score.
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