Assignee
INTEGRATED MATERIALS INC
US·25 granted patents·1 pending application·797 citations·filing 1999–2007
Top patents by PatentIndex Score
26 records- 0193US7736437B2Baffled liner coverINTEGRATED MATERIALS INC·Filed 2006·Granted Jun 15, 2010·465 cites·16 claims
- 0292US6450346B1Silicon fixtures for supporting wafers during thermal processingINTEGRATED MATERIALS INC·Filed 2000·Granted Sep 17, 2002·68 cites·47 claims
- 0389US6455395B1Method of fabricating silicon structures including fixtures for supporting wafersINTEGRATED MATERIALS INC·Filed 2000·Granted Sep 24, 2002·39 cites·18 claims
- 0487US7666513B2Adhesive of a silicon and silica composite for bonding together silicon partsINTEGRATED MATERIALS INC·Filed 2006·Granted Feb 23, 2010·11 cites·12 claims
- 0586US6617540B2Wafer support fixture composed of siliconINTEGRATED MATERIALS INC·Filed 2001·Granted Sep 9, 2003·30 cites·15 claims
- 0683US6284997B1Crack free welding of siliconINTEGRATED MATERIALS INC·Filed 2000·Granted Sep 4, 2001·24 cites·20 claims
- 0781US7736436B2Detachable edge ring for thermal processing support towersINTEGRATED MATERIALS INC·Filed 2006·Granted Jun 15, 2010·11 cites·11 claims
- 0877US6617225B2Method of machining siliconINTEGRATED MATERIALS INC·Filed 2002·Granted Sep 9, 2003·15 cites·22 claims
- 0974US7713355B2Silicon shelf towersINTEGRATED MATERIALS INC·Filed 2006·Granted May 11, 2010·5 cites·8 claims
- 1073US6979659B2Silicon fixture supporting silicon wafers during high temperature processingINTEGRATED MATERIALS INC·Filed 2004·Granted Dec 27, 2005·13 cites·22 claims
- 1172US7854974B2Tube formed of bonded silicon stavesINTEGRATED MATERIALS INC·Filed 2006·Granted Dec 21, 2010·3 cites·19 claims
- 1272US7611989B2Polysilicon dummy wafers and process used therewithINTEGRATED MATERIALS INC·Filed 2007·Granted Nov 3, 2009·3 cites·14 claims
- 1370US6727191B2High temperature hydrogen anneal of silicon wafers supported on a silicon fixtureINTEGRATED MATERIALS INC·Filed 2001·Granted Apr 27, 2004·12 cites·21 claims
- 1467US7083694B2Adhesive of a silicon and silica composite particularly useful for joining silicon partsINTEGRATED MATERIALS INC·Filed 2003·Granted Aug 1, 2006·9 cites·32 claims
- 1565US6357432B2Silicon support members for wafer processing fixturesINTEGRATED MATERIALS INC·Filed 2001·Granted Mar 19, 2002·8 cites·28 claims
- 1663US6225594B1Method and apparatus for securing components of wafer processing fixturesINTEGRATED MATERIALS INC·Filed 1999·Granted May 1, 2001·23 cites·26 claims
- 1762US7736747B2Silicon parts joined by a silicon layer preferably plasma sprayedINTEGRATED MATERIALS INC·Filed 2006·Granted Jun 15, 2010·1 cites·19 claims
- 1862US7137546B2Silicon tube formed of bonded stavesINTEGRATED MATERIALS INC·Filed 2003·Granted Nov 21, 2006·6 cites·26 claims
- 1961US7108746B2Silicon fixture with roughened surface supporting wafers in chemical vapor depositionINTEGRATED MATERIALS INC·Filed 2001·Granted Sep 19, 2006·7 cites·28 claims
- 2061US6205993B1Method and apparatus for fabricating elongate crystalline membersINTEGRATED MATERIALS INC·Filed 1999·Granted Mar 27, 2001·20 cites·20 claims
- 2159US6583377B2Welded silicon memberINTEGRATED MATERIALS INC·Filed 2002·Granted Jun 24, 2003·5 cites·37 claims
- 2255US7074693B2Plasma spraying for joining silicon partsINTEGRATED MATERIALS INC·Filed 2003·Granted Jul 11, 2006·4 cites·19 claims
- 2355US6403914B1Method for welding silicon workpiecesINTEGRATED MATERIALS INC·Filed 2001·Granted Jun 11, 2002·4 cites·22 claims
- 2447US6196211B1Support members for wafer processing fixturesINTEGRATED MATERIALS INC·Filed 1999·Granted Mar 6, 2001·11 cites·31 claims
- 2541US2007169701A1Tubular or Other Member Formed of Staves Bonded at Keyway InterlocksINTEGRATED MATERIALS INC·Filed 2006·Application pending·0 cites
- 2640US6838636B2Two heat sources for welding siliconINTEGRATED MATERIALS INC·Filed 2003·Granted Jan 4, 2005·0 cites·19 claims
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