Assignee
INTEGRATED PROCESS SYSTEMS LTD
KR·2 granted patents·14 citations·filing 2005–2006
Top patents by PatentIndex Score
2 records- 0181US7842606B2Method of depositing thin film and method of manufacturing semiconductor using the sameINTEGRATED PROCESS SYSTEMS LTD·Filed 2005·Granted Nov 30, 2010·10 cites·11 claims
- 0279US8029859B2Method of depositing Ge-Sb-Te thin filmINTEGRATED PROCESS SYSTEMS LTD·Filed 2006·Granted Oct 4, 2011·4 cites·16 claims
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