Assignee
INTERSURFACE DYNAMICS INC
US·2 granted patents·72 citations·filing 1998–2003
Top patents by PatentIndex Score
2 records- 0181US6395194B1Chemical mechanical polishing compositions, and process for the CMP removal of iridium thin using sameINTERSURFACE DYNAMICS INC·Filed 1998·Granted May 28, 2002·67 cites·6 claims
- 0245US7192886B2Method for using additives in the caustic etching of silicon for obtaining improved surface characteristicsINTERSURFACE DYNAMICS INC·Filed 2003·Granted Mar 20, 2007·5 cites·13 claims
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