Assignee

INTERUNIVERSITAIR MICRO ELKTRO

US·1 granted patent·422 citations·filing 1999–1999

Technology mixB81B1 B81C1 G01J1 G01L1 G01P1 H01H1

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0194US6297072B1Method of fabrication of a microstructure having an internal cavityINTERUNIVERSITAIR MICRO ELKTRO·Filed 1999·Granted Oct 2, 2001·422 cites·42 claims

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