Assignee
INTEVAC INC
US·101 granted patents·39 pending applications·2,202 citations·filing 1976–2024
Top patents by PatentIndex Score
140 records- 0196US6837766B2Unitary vacuum tube incorporating high voltage isolationINTEVAC INC·Filed 2003·Granted Jan 4, 2005·50 cites·8 claims
- 0295US7901539B2Apparatus and methods for transporting and processing substratesINTEVAC INC·Filed 2006·Granted Mar 8, 2011·28 cites·11 claims
- 0394US8349196B2System and method for commercial fabrication of patterned mediaINTEVAC INC·Filed 2008·Granted Jan 8, 2013·17 cites·14 claims
- 0493US7005637B2Backside thinning of image array devicesINTEVAC INC·Filed 2004·Granted Feb 28, 2006·64 cites·3 claims
- 0592US6204483B1Heating assembly for rapid thermal processing systemINTEVAC INC·Filed 1999·Granted Mar 20, 2001·48 cites·7 claims
- 0691US9914994B2System architecture for combined static and pass-by processingINTEVAC INC·Filed 2012·Granted Mar 13, 2018·14 cites·15 claims
- 0791US7611322B2Processing thin wafersINTEVAC INC·Filed 2005·Granted Nov 3, 2009·15 cites·8 claims
- 0891US6919001B2Disk coating systemINTEVAC INC·Filed 2003·Granted Jul 19, 2005·74 cites·28 claims
- 0989US5873989AMethods and apparatus for linear scan magnetron sputteringINTEVAC INC·Filed 1997·Granted Feb 23, 1999·69 cites·16 claims
- 1089US5830327AMethods and apparatus for sputtering with rotating magnet sputter sourcesINTEVAC INC·Filed 1996·Granted Nov 3, 1998·84 cites·17 claims
- 1189US5369267AMicrochannel image intensifier tube with novel sealing featureINTEVAC INC·Filed 1993·Granted Nov 29, 1994·80 cites·19 claims
- 1288US9525099B2Dual-mask arrangement for solar cell fabricationINTEVAC INC·Filed 2013·Granted Dec 20, 2016·10 cites·19 claims
- 1388US5576559AHeterojunction electron transfer deviceINTEVAC INC·Filed 1994·Granted Nov 19, 1996·77 cites·21 claims
- 1488US5215420ASubstrate handling and processing systemINTEVAC INC·Filed 1991·Granted Jun 1, 1993·117 cites·29 claims
- 1587US5738767ASubstrate handling and processing system for flat panel displaysINTEVAC INC·Filed 1994·Granted Apr 14, 1998·69 cites·25 claims
- 1686US10679883B2Wafer plate and mask arrangement for substrate fabricationINTEVAC INC·Filed 2016·Granted Jun 9, 2020·10 cites·28 claims
- 1786US10197802B2Biocular compact collimation apparatusINTEVAC INC·Filed 2017·Granted Feb 5, 2019·5 cites·20 claims
- 1886US10115617B2System architecture for vacuum processingINTEVAC INC·Filed 2016·Granted Oct 30, 2018·5 cites·15 claims
- 1986US9543114B2Implant masking and alignment system with rollersINTEVAC INC·Filed 2015·Granted Jan 10, 2017·4 cites·16 claims
- 2086US9324598B2Substrate processing system and methodINTEVAC INC·Filed 2012·Granted Apr 26, 2016·7 cites·19 claims
- 2186US9303314B2Ion implant system having grid assemblyINTEVAC INC·Filed 2014·Granted Apr 5, 2016·4 cites·23 claims
- 2286US6285018B1Electron bombarded active pixel sensorINTEVAC INC·Filed 1999·Granted Sep 4, 2001·117 cites·25 claims
- 2386US6236021B1Substrate transport assembly for rapid thermal processing systemINTEVAC INC·Filed 1999·Granted May 22, 2001·27 cites·12 claims
- 2486US6228429B1Methods and apparatus for processing insulating substratesINTEVAC INC·Filed 2000·Granted May 8, 2001·21 cites·18 claims
- 2586US5684360AElectron sources utilizing negative electron affinity photocathodes with ultra-small emission areasINTEVAC INC·Filed 1995·Granted Nov 4, 1997·66 cites·31 claims
- 2686US5374826AHybrid photomultiplier tube with high sensitivityINTEVAC INC·Filed 1993·Granted Dec 20, 1994·46 cites·26 claims
- 2785US9892890B2Narrow source for physical vapor deposition processingINTEVAC INC·Filed 2013·Granted Feb 13, 2018·8 cites·20 claims
- 2885US9734977B2Image intensifier with indexed compliant anode assemblyINTEVAC INC·Filed 2015·Granted Aug 15, 2017·4 cites·19 claims
- 2984US8363378B2Method for optimized removal of wafer from electrostatic chuckINTEVAC INC·Filed 2009·Granted Jan 29, 2013·13 cites·42 claims
- 3084US6657178B2Electron bombarded passive pixel sensor imagingINTEVAC INC·Filed 2001·Granted Dec 2, 2003·26 cites·30 claims
- 3184US6517691B1Substrate processing systemINTEVAC INC·Filed 2000·Granted Feb 11, 2003·46 cites·34 claims
- 3284US6183831B1Hard disk vapor lubeINTEVAC INC·Filed 1998·Granted Feb 6, 2001·54 cites·20 claims
- 3384US5181556ASystem for substrate cooling in an evacuated environmentINTEVAC INC·Filed 1991·Granted Jan 26, 1993·49 cites·8 claims
- 3483US9741894B2Ion implant system having grid assemblyINTEVAC INC·Filed 2016·Granted Aug 22, 2017·2 cites·7 claims
- 3583US6005247AElectron beam microscope using electron beam patternsINTEVAC INC·Filed 1997·Granted Dec 21, 1999·49 cites·28 claims
- 3682US9875922B2Substrate processing system and methodINTEVAC INC·Filed 2016·Granted Jan 23, 2018·3 cites·16 claims
- 3782US9502276B2System architecture for vacuum processingINTEVAC INC·Filed 2013·Granted Nov 22, 2016·5 cites·18 claims
- 3882US9318332B2Grid for plasma ion implantINTEVAC INC·Filed 2013·Granted Apr 19, 2016·4 cites·22 claims
- 3982US5047821ATransferred electron III-V semiconductor photocathodeINTEVAC INC·Filed 1990·Granted Sep 10, 1991·42 cites·19 claims
- 4082US2024194455A1Method and apparatus for uniform high throughput multiple layer filmsINTEVAC INC·Filed 2023·Application pending·0 cites
- 4181US7479686B2Backside imaging through a doped layerINTEVAC INC·Filed 2005·Granted Jan 20, 2009·5 cites·7 claims
- 4281US5425611ASubstrate handling and processing systemINTEVAC INC·Filed 1994·Granted Jun 20, 1995·70 cites·2 claims
- 4381US5287914ASystem for substrate cooling in an evacuated environmentINTEVAC INC·Filed 1992·Granted Feb 22, 1994·45 cites·8 claims
- 4480US6507147B1Unitary vacuum tube incorporating high voltage isolationINTEVAC INC·Filed 2000·Granted Jan 14, 2003·12 cites·17 claims
- 4579US12283470B2Multifocal magnetron design for physical vapor deposition processing on a single cathodeINTEVAC INC·Filed 2022·Granted Apr 22, 2025·0 cites·9 claims
- 4679US6101972APlasma processing system and methodINTEVAC INC·Filed 1999·Granted Aug 15, 2000·32 cites·30 claims
- 4779US5932966AElectron sources utilizing patterned negative electron affinity photocathodesINTEVAC INC·Filed 1997·Granted Aug 3, 1999·34 cites·26 claims
- 4878US10062600B2System and method for bi-facial processing of substratesINTEVAC INC·Filed 2015·Granted Aug 28, 2018·3 cites·21 claims
- 4978US7607560B2Semiconductor die attachment for high vacuum tubesINTEVAC INC·Filed 2005·Granted Oct 27, 2009·4 cites·8 claims
- 5078US6307586B1Electron bombarded active pixel sensor camera incorporating gain controlINTEVAC INC·Filed 1999·Granted Oct 23, 2001·57 cites·25 claims
Showing the top 50 of 140 patent records by PatentIndex Score.
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