Assignee
IORI KAZUYUKI
JP·2 granted patents·20 citations·filing 2010–2011
Top patents by PatentIndex Score
2 records- 0184US8231767B2Magnetic field generating apparatus and plasma processing apparatusIORI KAZUYUKI·Filed 2010·Granted Jul 31, 2012·10 cites·6 claims
- 0283US8475672B2Plasma processing device, plasma processing method and method of manufacturing element including substrate to be processedIORI KAZUYUKI·Filed 2011·Granted Jul 2, 2013·10 cites·16 claims
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