Assignee
ISHIGO KAZUTAKA
JP·2 granted patents·7 citations·filing 2011–2012
Technology mixG03F2
Top patents by PatentIndex Score
2 records- 0184US9158212B2Exposure apparatus, exposure control system, and exposure methodISHIGO KAZUTAKA·Filed 2012·Granted Oct 13, 2015·7 cites·20 claims
- 0233US9250542B2Overlay/alignment measurement method and overlay/alignment measurement apparatusISHIGO KAZUTAKA·Filed 2011·Granted Feb 2, 2016·0 cites·15 claims
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