Assignee
ISHIMARU NOBUO
JP·3 granted patents·21 citations·filing 2006–2009
Top patents by PatentIndex Score
3 records- 0186US8093072B2Substrate processing apparatus and method of manufacturing semiconductor deviceISHIMARU NOBUO·Filed 2009·Granted Jan 10, 2012·12 cites·7 claims
- 0279US8251012B2Substrate processing apparatus and semiconductor device producing methodISHIMARU NOBUO·Filed 2006·Granted Aug 28, 2012·6 cites·6 claims
- 0378US8297224B2Substrate processing apparatusISHIMARU NOBUO·Filed 2009·Granted Oct 30, 2012·3 cites·9 claims
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