Assignee
ITABASHI NAOSHI
JP·1 granted patent·2 pending applications·3 citations·filing 2004–2011
Top patents by PatentIndex Score
3 records- 0173US8282767B2Plasma processing apparatusITABASHI NAOSHI·Filed 2011·Granted Oct 9, 2012·3 cites·2 claims
- 0256US2009165951A1Plasma processing apparatus capable of suppressing variation of processing characteristicsITABASHI NAOSHI·Filed 2009·Application pending·0 cites
- 0341US2006032584A1Plasma processing apparatus capable of suppressing variation of processing characteristicsITABASHI NAOSHI·Filed 2004·Application pending·0 cites
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