Assignee

IWAI TETSUHIRO

JP·2 granted patents·14 citations·filing 2008–2012

Technology mixH10P2 B05C1 B44C1 C23C1 H01J1 H01L1

Top patents by PatentIndex Score

2 records

0186US8513097B2Plasma processing apparatusIWAI TETSUHIRO·Filed 2008·Granted Aug 20, 2013·9 cites·2 claims
0279US8945411B2Plasma processing apparatus and plasma processing methodIWAI TETSUHIRO·Filed 2012·Granted Feb 3, 2015·5 cites·7 claims

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