Assignee
JAIN KANTILAL
US·4 granted patents·527 citations·filing 1988–1989
Top patents by PatentIndex Score
4 records- 0197US4924257AScan and repeat high resolution projection lithography systemJAIN KANTILAL·Filed 1988·Granted May 8, 1990·266 cites·22 claims
- 0295US5059013AIllumination system to produce self-luminous light beam of selected cross-section, uniform intensity and selected numerical apertureJAIN KANTILAL·Filed 1988·Granted Oct 22, 1991·159 cites·22 claims
- 0393US4881231AFrequency-stabilized line-narrowed excimer laser source system for high resolution lithographyJAIN KANTILAL·Filed 1988·Granted Nov 14, 1989·70 cites·22 claims
- 0479US4991962AHigh precision alignment system for microlithographyJAIN KANTILAL·Filed 1989·Granted Feb 12, 1991·32 cites·16 claims
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