Assignee
JE SUNG TAE
KR·3 granted patents·2 pending applications·20 citations·filing 2009–2011
Top patents by PatentIndex Score
5 records- 0194US8771418B2Substrate-processing apparatus and substrate-processing method for selectively inserting diffusion platesJE SUNG TAE·Filed 2010·Granted Jul 8, 2014·20 cites·11 claims
- 0246US8528499B2Substrate processing apparatus and methodJE SUNG-TAE·Filed 2009·Granted Sep 10, 2013·0 cites·5 claims
- 0334US2013149078A1Substrate-processing apparatus and substrate-transferring methodJE SUNG TAE·Filed 2011·Application pending·0 cites
- 0430US9416451B2Substrate processing device equipped with semicircle shaped antennaJE SUNG TAE·Filed 2011·Granted Aug 16, 2016·0 cites·7 claims
- 0530US2013186337A1Substrate processing device for supplying reaction gas through symmetry-type inlet and outletJE SUNG TAE·Filed 2011·Application pending·0 cites
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