Assignee

JOHNSON ANDREW DAVID

US·1 granted patent·1 pending application·51 citations·filing 2006–2011

Technology mixB01D1 B08B1 C01B1 C23C1 H10P1 Y02P1

Top patents by PatentIndex Score

2 records

0194US8535414B2Recovering of xenon by adsorption processJOHNSON ANDREW DAVID·Filed 2011·Granted Sep 17, 2013·51 cites·18 claims
0239US2008142046A1Thermal F2 etch process for cleaning CVD chambersJOHNSON ANDREW DAVID·Filed 2006·Application pending·0 cites

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