Assignee
JUSUNG ENG CO LTD
US·128 granted patents·145 pending applications·1,456 citations·filing 1997–2025
Top patents by PatentIndex Score
273 records- 0199US6884319B2Susceptor of apparatus for manufacturing semiconductor deviceJUSUNG ENG CO LTD·Filed 2002·Granted Apr 26, 2005·549 cites·16 claims
- 0296US6634314B2Atomic layer deposition method and semiconductor device fabricating apparatus having rotatable gas injectorsJUSUNG ENG CO LTD·Filed 2001·Granted Oct 21, 2003·139 cites·11 claims
- 0395US7905960B2Apparatus for manufacturing substrateJUSUNG ENG CO LTD·Filed 2005·Granted Mar 15, 2011·44 cites·11 claims
- 0495US6723595B2Thin film deposition method including using atomic layer deposition without purging between introducing the gaseous reactantsJUSUNG ENG CO LTD·Filed 2002·Granted Apr 20, 2004·74 cites·19 claims
- 0590US6656284B1Semiconductor device manufacturing apparatus having rotatable gas injector and thin film deposition method using the sameJUSUNG ENG CO LTD·Filed 2002·Granted Dec 2, 2003·46 cites·11 claims
- 0689US7771150B2Gate valve and substrate-treating apparatus including the sameJUSUNG ENG CO LTD·Filed 2006·Granted Aug 10, 2010·16 cites·11 claims
- 0789US7367281B2Plasma antennaJUSUNG ENG CO LTD·Filed 2005·Granted May 6, 2008·14 cites·13 claims
- 0889US6872421B2Atomic layer deposition methodJUSUNG ENG CO LTD·Filed 2003·Granted Mar 29, 2005·36 cites·9 claims
- 0987US11600512B2Substrate processing apparatus and rotating electrical connector for vacuumJUSUNG ENG CO LTD·Filed 2022·Granted Mar 7, 2023·1 cites·11 claims
- 1087US10808315B2Substrate processing apparatus having exhaust gas decomposer, and exhaust gas processing method thereforJUSUNG ENG CO LTD·Filed 2016·Granted Oct 20, 2020·5 cites·10 claims
- 1187US6288493B1Antenna device for generating inductively coupled plasmaJUSUNG ENG CO LTD·Filed 2000·Granted Sep 11, 2001·84 cites·23 claims
- 1286US7943969B2Transistor with a plurality of layers with different Ge concentrationsJUSUNG ENG CO LTD·Filed 2008·Granted May 17, 2011·14 cites·7 claims
- 1386US7846292B2Gas injector and apparatus including the sameJUSUNG ENG CO LTD·Filed 2006·Granted Dec 7, 2010·13 cites·7 claims
- 1483US7375041B2Transfer chamber for cluster systemJUSUNG ENG CO LTD·Filed 2005·Granted May 20, 2008·8 cites·31 claims
- 1583US6530993B2Cluster tool for fabricating semiconductor deviceJUSUNG ENG CO LTD·Filed 2001·Granted Mar 11, 2003·33 cites·17 claims
- 1682US8035056B2Plasma generation apparatusJUSUNG ENG CO LTD·Filed 2008·Granted Oct 11, 2011·6 cites·18 claims
- 1782US6769629B2Gas injector adapted for ALD processJUSUNG ENG CO LTD·Filed 2002·Granted Aug 3, 2004·25 cites·4 claims
- 1882US2026062805A1Substrate processing methodJUSUNG ENG CO LTD·Filed 2025·Application pending·0 cites
- 1981US7951261B2Plasma etching apparatusJUSUNG ENG CO LTD·Filed 2006·Granted May 31, 2011·11 cites·19 claims
- 2081US7845892B2Movable transfer chamber and substrate-treating apparatus including the sameJUSUNG ENG CO LTD·Filed 2006·Granted Dec 7, 2010·9 cites·20 claims
- 2181US7442273B2Apparatus using hybrid coupled plasmaJUSUNG ENG CO LTD·Filed 2004·Granted Oct 28, 2008·18 cites·14 claims
- 2281US7391098B2Semiconductor substrate, semiconductor device and method of manufacturing the sameJUSUNG ENG CO LTD·Filed 2005·Granted Jun 24, 2008·7 cites·10 claims
- 2380US7942623B2Substrate supporting means having wire and apparatus using the sameJUSUNG ENG CO LTD·Filed 2010·Granted May 17, 2011·4 cites·20 claims
- 2480US7771538B2Substrate supporting means having wire and apparatus using the sameJUSUNG ENG CO LTD·Filed 2005·Granted Aug 10, 2010·6 cites·27 claims
- 2579US7879187B2Plasma etching apparatusJUSUNG ENG CO LTD·Filed 2006·Granted Feb 1, 2011·8 cites·11 claims
- 2679US7104476B2Multi-sectored flat board type showerhead used in CVD apparatusJUSUNG ENG CO LTD·Filed 2002·Granted Sep 12, 2006·17 cites·13 claims
- 2778US6772710B2Plasma enhanced chemical vapor deposition apparatusJUSUNG ENG CO LTD·Filed 2002·Granted Aug 10, 2004·18 cites·5 claims
- 2877US11293097B2Apparatus for distributing gas and apparatus for processing substrate including the sameJUSUNG ENG CO LTD·Filed 2019·Granted Apr 5, 2022·1 cites·6 claims
- 2976US12024774B2Apparatus for supplying gas and apparatus for processing substrate using the sameJUSUNG ENG CO LTD·Filed 2020·Granted Jul 2, 2024·1 cites·9 claims
- 3076US6383953B2Apparatus for fabricating semiconductor device and method for fabricating semiconductor using the sameJUSUNG ENG CO LTD·Filed 2001·Granted May 7, 2002·19 cites·9 claims
- 3175US9748077B2Substrate processing device and substrate processing methodJUSUNG ENG CO LTD·Filed 2013·Granted Aug 29, 2017·3 cites·6 claims
- 3275US7411148B2Plasma generation apparatusJUSUNG ENG CO LTD·Filed 2006·Granted Aug 12, 2008·8 cites·18 claims
- 3373US12106941B2Substrate processing device and substrate processing methodJUSUNG ENG CO LTD·Filed 2023·Granted Oct 1, 2024·0 cites·11 claims
- 3473US7390366B2Apparatus for chemical vapor depositionJUSUNG ENG CO LTD·Filed 2002·Granted Jun 24, 2008·14 cites·11 claims
- 3573US2026010180A1Gas supply apparatus for substrate processing apparatusJUSUNG ENG CO LTD·Filed 2025·Application pending·0 cites
- 3672US11427906B2Chamber cleaning device and chamber cleaning methodJUSUNG ENG CO LTD·Filed 2019·Granted Aug 30, 2022·0 cites·9 claims
- 3772US7381274B2Gas valve assembly and apparatus using the sameJUSUNG ENG CO LTD·Filed 2004·Granted Jun 3, 2008·14 cites·12 claims
- 3872US7282460B2Transfer chamber for cluster systemJUSUNG ENG CO LTD·Filed 2004·Granted Oct 16, 2007·12 cites·11 claims
- 3972US2025116004A1Substrate processing apparatusJUSUNG ENG CO LTD·Filed 2024·Application pending·0 cites
- 4071US6847516B2Electrostatic chuck for preventing an arcJUSUNG ENG CO LTD·Filed 2002·Granted Jan 25, 2005·16 cites·13 claims
- 4170US12065734B2Chamber cleaning device and chamber cleaning methodJUSUNG ENG CO LTD·Filed 2022·Granted Aug 20, 2024·0 cites·6 claims
- 4270US11970770B2Substrate processing apparatus having exhaust gas decomposer, and exhaust gas processing method thereforJUSUNG ENG CO LTD·Filed 2022·Granted Apr 30, 2024·0 cites·6 claims
- 4370US11488803B2Substrate processing apparatusJUSUNG ENG CO LTD·Filed 2019·Granted Nov 1, 2022·1 cites·3 claims
- 4470US10504701B2Substrate processing device and substrate processing methodJUSUNG ENG CO LTD·Filed 2017·Granted Dec 10, 2019·1 cites·3 claims
- 4569US12446351B2Substrate for solar cell, solar cell, and solar cell manufacturing methodJUSUNG ENG CO LTD·Filed 2024·Granted Oct 14, 2025·0 cites·6 claims
- 4669US6770836B2Impedance matching circuit for inductively coupled plasma sourceJUSUNG ENG CO LTD·Filed 2002·Granted Aug 3, 2004·25 cites·16 claims
- 4769US6734100B2Method of forming ruthenium thin film using plasma enhanced processJUSUNG ENG CO LTD·Filed 2002·Granted May 11, 2004·12 cites·20 claims
- 4869US2025223695A1Gas supply method of substrate processing apparatusJUSUNG ENG CO LTD·Filed 2024·Application pending·0 cites
- 4969US2024371612A1Substrate processing apparatusJUSUNG ENG CO LTD·Filed 2024·Application pending·0 cites
- 5069US2025029817A1Substrate processing apparatusJUSUNG ENG CO LTD·Filed 2024·Application pending·0 cites
Showing the top 50 of 273 patent records by PatentIndex Score.
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