Assignee
KADIJK EDWIN CORNELIS
NL·2 granted patents·1 citations·filing 2008–2009
Technology mixG03F2
Top patents by PatentIndex Score
2 records- 0152US8638421B2Lithographic apparatus and method of cleaning a lithographic apparatusKADIJK EDWIN CORNELIS·Filed 2008·Granted Jan 28, 2014·1 cites·33 claims
- 0247US8441609B2Lithographic apparatus and a method of operating the lithographic apparatusKADIJK EDWIN CORNELIS·Filed 2009·Granted May 14, 2013·0 cites·19 claims
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