Assignee
KADLEC STANISLAV
CZ·5 granted patents·45 citations·filing 2007–2012
Top patents by PatentIndex Score
5 records- 0193US8574409B2Method of magnetron sputtering and a method for determining a power modulation compensation function for a power supply applied to a magnetron sputtering sourceKADLEC STANISLAV·Filed 2012·Granted Nov 5, 2013·18 cites·6 claims
- 0292US9355824B2Arc suppression and pulsing in high power impulse magnetron sputtering (HIPIMS)KADLEC STANISLAV·Filed 2007·Granted May 31, 2016·17 cites·16 claims
- 0386US8435389B2RF substrate bias with high power impulse magnetron sputtering (HIPIMS)KADLEC STANISLAV·Filed 2007·Granted May 7, 2013·7 cites·5 claims
- 0479US9611537B2Target shapingKADLEC STANISLAV·Filed 2011·Granted Apr 4, 2017·2 cites·10 claims
- 0565US8246794B2Method of magnetron sputtering and a method for determining a power modulation compensation function for a power supply applied to a magnetron sputtering sourceKADLEC STANISLAV·Filed 2008·Granted Aug 21, 2012·1 cites·12 claims
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