Assignee
KAGOSHIMA AKIRA
JP·2 granted patents·3 pending applications·11 citations·filing 2005–2012
Top patents by PatentIndex Score
5 records- 0183US8992721B2Plasma processing apparatusKAGOSHIMA AKIRA·Filed 2010·Granted Mar 31, 2015·7 cites·9 claims
- 0277US8828184B2Plasma processing apparatus and plasma processing methodKAGOSHIMA AKIRA·Filed 2012·Granted Sep 9, 2014·4 cites·5 claims
- 0357US2009120580A1Disturbance-Free, Recipe-Controlled Plasma Processing System And MethodKAGOSHIMA AKIRA·Filed 2009·Application pending·0 cites
- 0453US2007193687A1Disturbance-free, recipe-controlled plasma processing system and methodKAGOSHIMA AKIRA·Filed 2007·Application pending·0 cites
- 0546US2005236364A1Etching system and etching methodKAGOSHIMA AKIRA·Filed 2005·Application pending·0 cites
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