Assignee
KAMO TAKASHI
JP·4 granted patents·2 pending applications·12 citations·filing 2006–2012
Top patents by PatentIndex Score
6 records- 0188US9164371B2Method of correcting defects in a reflection-type mask and mask-defect correction apparatusKAMO TAKASHI·Filed 2012·Granted Oct 20, 2015·6 cites·8 claims
- 0284US8173332B2Reflection-type exposure mask and method of manufacturing a semiconductor deviceKAMO TAKASHI·Filed 2010·Granted May 8, 2012·5 cites·20 claims
- 0366US8535854B2Reflective exposure mask, method of fabricating reflective exposure mask, method of inspecting reflective exposure mask, and method of cleaning reflective exposure maskKAMO TAKASHI·Filed 2010·Granted Sep 17, 2013·1 cites·6 claims
- 0451US8603707B2Exposure method and exposure maskKAMO TAKASHI·Filed 2012·Granted Dec 10, 2013·0 cites·17 claims
- 0540US2006206853A1Method of producing mask inspection data, method of manufacturing a photo mask and method of manufacturing a semiconductor deviceKAMO TAKASHI·Filed 2006·Application pending·0 cites
- 0639US2012141927A1Reflective mask and method for manufacturing the sameKAMO TAKASHI·Filed 2011·Application pending·0 cites
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Counts cover granted patents and pending applications in the PatentIndex corpus. How scoring works →