Assignee
KANARIK KEREN JACOBS
US·4 granted patents·1 pending application·156 citations·filing 2009–2012
Top patents by PatentIndex Score
5 records- 0198US8883028B2Mixed mode pulsing etching in plasma processing systemsKANARIK KEREN JACOBS·Filed 2012·Granted Nov 11, 2014·83 cites·23 claims
- 0298US8808561B2Inert-dominant pulsing in plasma processing systemsKANARIK KEREN JACOBS·Filed 2012·Granted Aug 19, 2014·70 cites·24 claims
- 0373US8206996B2Etch tool process indicator method and apparatusKANARIK KEREN JACOBS·Filed 2009·Granted Jun 26, 2012·2 cites·17 claims
- 0466US8492174B2Etch tool process indicator method and apparatusKANARIK KEREN JACOBS·Filed 2012·Granted Jul 23, 2013·1 cites·16 claims
- 0541US2013119018A1Hybrid pulsing plasma processing systemsKANARIK KEREN JACOBS·Filed 2012·Application pending·0 cites
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