Assignee
KANDEL DANIEL
IL·5 granted patents·82 citations·filing 2006–2012
Top patents by PatentIndex Score
5 records- 0197US8441639B2Metrology systems and methodsKANDEL DANIEL·Filed 2010·Granted May 14, 2013·35 cites·22 claims
- 0293US8908175B1Flexible scatterometry metrology system and methodKANDEL DANIEL·Filed 2006·Granted Dec 9, 2014·26 cites·36 claims
- 0392US8848186B2Angle-resolved antisymmetric scatterometryKANDEL DANIEL·Filed 2010·Granted Sep 30, 2014·8 cites·17 claims
- 0490US9927718B2Multi-layer overlay metrology target and complimentary overlay metrology measurement systemsKANDEL DANIEL·Filed 2011·Granted Mar 27, 2018·9 cites·24 claims
- 0580US11372340B2Method and system for providing a quality metric for improved process controlKANDEL DANIEL·Filed 2012·Granted Jun 28, 2022·4 cites·22 claims
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