Assignee
KANEKO TOMOHIRO
JP·4 granted patents·2 pending applications·0 citations·filing 2006–2012
Top patents by PatentIndex Score
6 records- 0146US8306646B2Coating and developing apparatus, coating and developing method, and storage mediumKANEKO TOMOHIRO·Filed 2009·Granted Nov 6, 2012·0 cites·14 claims
- 0245US8747949B2Coating and developing system, method of controlling coating and developing system and storage mediumKANEKO TOMOHIRO·Filed 2010·Granted Jun 10, 2014·0 cites·11 claims
- 0342US2007219660A1Substrate transporting and processing apparatus, fault management method for substrate transport and processing apparatus, and storage medium storing fault management programKANEKO TOMOHIRO·Filed 2006·Application pending·0 cites
- 0440US8393845B2Substrate convey processing device, trouble countermeasure method in substrate convey processing device, and trouble countermeasures program in substrate convey processing deviceKANEKO TOMOHIRO·Filed 2006·Granted Mar 12, 2013·0 cites·7 claims
- 0538US9786533B2Substrate processing apparatus, substrate processing method and storage mediumKANEKO TOMOHIRO·Filed 2012·Granted Oct 10, 2017·0 cites·4 claims
- 0635US2010186727A1Control device for internal combustion engine, and control method thereofKANEKO TOMOHIRO·Filed 2008·Application pending·0 cites
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