Assignee

KANG HEE-YOUNG

KR·1 granted patent·1 pending application·0 citations·filing 2005–2018

Technology mixA47L1 G03F1 H01F1 H05B1 H10P1

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2 records

0144US10582818B2Cleaning assemblyKANG HEE YOUNG·Filed 2018·Granted Mar 10, 2020·0 cites·3 claims
0233US2007068920A1Bake unit, method for cooling heating plate used in the bake unit, apparatus and method for treating substrates with the bake unitKANG HEE-YOUNG·Filed 2005·Application pending·0 cites

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