Assignee
KANG YOOL
KR·2 granted patents·4 citations·filing 2008–2008
Top patents by PatentIndex Score
2 records- 0172US8431331B2Method of forming fine patterns of semiconductor device by using double patterning process which uses acid diffusionKANG YOOL·Filed 2008·Granted Apr 30, 2013·4 cites·20 claims
- 0245US8536347B2Photoacid generator, chemically amplified resist composition including the same, and associated methodsKANG YOOL·Filed 2008·Granted Sep 17, 2013·0 cites·9 claims
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