Assignee
KANKEN TECHNO CO LTD
JP·10 granted patents·7 pending applications·186 citations·filing 1995–2022
Top patents by PatentIndex Score
17 records- 0194US5649985AApparatus for removing harmful substances of exhaust gas discharged from semiconductor manufacturing processKANKEN TECHNO CO LTD·Filed 1995·Granted Jul 22, 1997·104 cites·4 claims
- 0286US10617997B1Apparatus for exhaust gas abatement under reduced pressureKANKEN TECHNO CO LTD·Filed 2018·Granted Apr 14, 2020·3 cites·5 claims
- 0371US5716428AMethod for removing harmful substances of exhaust gas discharged from semiconductor manufacturing processKANKEN TECHNO CO LTD·Filed 1997·Granted Feb 10, 1998·35 cites·2 claims
- 0467US7005117B2Method for removing harmful components in an exhaust gasKANKEN TECHNO CO LTD·Filed 2002·Granted Feb 28, 2006·10 cites·8 claims
- 0562US7976807B2Method for detoxifying HCD gas and apparatus thereforKANKEN TECHNO CO LTD·Filed 2007·Granted Jul 12, 2011·1 cites·1 claims
- 0662US6482367B1Method and apparatus for removing harmful components in an exhaust gasKANKEN TECHNO CO LTD·Filed 2000·Granted Nov 19, 2002·8 cites·7 claims
- 0760US6126906AApparatus for removing harmful components in a semiconductor exhaust gasKANKEN TECHNO CO LTD·Filed 1998·Granted Oct 3, 2000·24 cites·6 claims
- 0860US2026097361A1Gas abatement apparatus and gas treatment methodKANKEN TECHNO CO LTD·Filed 2022·Application pending·0 cites
- 0957US9937467B2Exhaust gas processing deviceKANKEN TECHNO CO LTD·Filed 2014·Granted Apr 10, 2018·1 cites·6 claims
- 1055US2024367103A1Ethylene oxide gas removal method, and ethylene oxide gas removal system using sameKANKEN TECHNO CO LTD·Filed 2021·Application pending·0 cites
- 1155US2024082782A1Treatment device for semiconductor manufacturing exhaust gasKANKEN TECHNO CO LTD·Filed 2021·Application pending·0 cites
- 1253US11504669B2Method for exhaust gas abatement under reduced pressure and apparatus thereforKANKEN TECHNO CO LTD·Filed 2018·Granted Nov 22, 2022·0 cites·4 claims
- 1347US2023233982A1Gas processing furnace and exhaust gas processing device in which same is usedKANKEN TECHNO CO LTD·Filed 2020·Application pending·0 cites
- 1446US12161964B2Cylindrical heating unit and exhaust gas processing device including the cylindrical heating unitKANKEN TECHNO CO LTD·Filed 2022·Granted Dec 10, 2024·0 cites·12 claims
- 1546US2023417410A1Gas processing furnace and exhaust gas processing device in which same is usedKANKEN TECHNO CO LTD·Filed 2020·Application pending·0 cites
- 1645US2020033000A1Method and apparatus for exhaust gas abatement under reduced pressureKANKEN TECHNO CO LTD·Filed 2018·Application pending·0 cites
- 1740US2024237155A1Electric heating deviceKANKEN TECHNO CO LTD·Filed 2020·Application pending·0 cites
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