Assignee
KANNO SEIICHIRO
JP·2 granted patents·4 pending applications·5 citations·filing 2004–2010
Top patents by PatentIndex Score
6 records- 0175US8680466B2Electron microscope, and specimen holding methodKANNO SEIICHIRO·Filed 2009·Granted Mar 25, 2014·5 cites·10 claims
- 0248US2007240825A1Wafer processing apparatus capable of controlling wafer temperatureKANNO SEIICHIRO·Filed 2007·Application pending·0 cites
- 0340US2006042757A1Wafer processing apparatus capable of controlling wafer temperatureKANNO SEIICHIRO·Filed 2004·Application pending·0 cites
- 0438US2006191482A1Apparatus and method for processing waferKANNO SEIICHIRO·Filed 2005·Application pending·0 cites
- 0538US2006291132A1Electrostatic chuck, wafer processing apparatus and plasma processing methodKANNO SEIICHIRO·Filed 2006·Application pending·0 cites
- 0636US8653459B2Scanning electron microscopeKANNO SEIICHIRO·Filed 2010·Granted Feb 18, 2014·0 cites·20 claims
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