Assignee

KAO CHUNG-EN

TW·2 granted patents·3 citations·filing 2011–2011

Technology mixB25J1 C23C1 H01J1 H10P1 Y10S1

Top patents by PatentIndex Score

2 records

0164US8953298B2Electrostatic chuck robotic systemKAO CHUNG-EN·Filed 2011·Granted Feb 10, 2015·2 cites·20 claims
0261US9708706B2PVD apparatus and method with deposition chamber having multiple targets and magnetsKAO CHUNG-EN·Filed 2011·Granted Jul 18, 2017·1 cites·20 claims

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