Assignee
KASA KENTARO
JP·2 granted patents·2 citations·filing 2009–2012
Technology mixG03F2
Top patents by PatentIndex Score
2 records- 0163US8085393B2Exposure apparatus inspection method and method for manufacturing semiconductor deviceKASA KENTARO·Filed 2009·Granted Dec 27, 2011·2 cites·21 claims
- 0242US9188879B2Substrate holding apparatus, pattern transfer apparatus, and pattern transfer methodKASA KENTARO·Filed 2012·Granted Nov 17, 2015·0 cites·20 claims
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