Assignee
KASHIYAMA INDUSTRY CO LTD
JP·2 granted patents·68 citations·filing 1994–1995
Top patents by PatentIndex Score
2 records- 0181US5443644AGas exhaust system and pump cleaning system for a semiconductor manufacturing apparatusKASHIYAMA INDUSTRY CO LTD·Filed 1994·Granted Aug 22, 1995·38 cites·2 claims
- 0276US5549463AComposite dry vacuum pump having roots and screw rotorsKASHIYAMA INDUSTRY CO LTD·Filed 1995·Granted Aug 27, 1996·30 cites·1 claims
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