Assignee
KASPER INSTRUMENTS
11 granted patents·380 citations·filing 1972–1981
Top patents by PatentIndex Score
11 records- 0192US4228902ACarrier for semiconductive wafersKASPER INSTRUMENTS·Filed 1979·Granted Oct 21, 1980·85 cites·20 claims
- 0290US3955072AApparatus for the automatic alignment of two superimposed objects for example a semiconductor wafer and a transparent maskKASPER INSTRUMENTS·Filed 1972·Granted May 4, 1976·45 cites·40 claims
- 0389US4070117AApparatus for the automatic alignment of two superimposed objects, e.g. a semiconductor wafer and maskKASPER INSTRUMENTS·Filed 1976·Granted Jan 24, 1978·46 cites·20 claims
- 0488US4153164ACarrier for semiconductive wafersKASPER INSTRUMENTS·Filed 1978·Granted May 8, 1979·72 cites·6 claims
- 0585US4241389AMultiple apparent source optical imaging systemKASPER INSTRUMENTS·Filed 1979·Granted Dec 23, 1980·34 cites·2 claims
- 0680US4040736AStep-and-repeat projection alignment and exposure systemKASPER INSTRUMENTS·Filed 1975·Granted Aug 9, 1977·27 cites·37 claims
- 0769US3940211AStep-and-repeat projection alignment and exposure systemKASPER INSTRUMENTS·Filed 1973·Granted Feb 24, 1976·16 cites·66 claims
- 0861US4236851ADisc handling system and methodKASPER INSTRUMENTS·Filed 1978·Granted Dec 2, 1980·21 cites·16 claims
- 0953US4408885AApparatus for the automatic alignment of two superimposed objects, e.g. a semiconductor wafer and maskKASPER INSTRUMENTS·Filed 1981·Granted Oct 11, 1983·12 cites·2 claims
- 1051US4259019AApparatus for the automatic alignment of two superimposed objects, for example a semiconductor wafer and a transparent maskKASPER INSTRUMENTS·Filed 1977·Granted Mar 31, 1981·10 cites·9 claims
- 1146US4181214AWafer transfer apparatusKASPER INSTRUMENTS·Filed 1977·Granted Jan 1, 1980·12 cites·10 claims
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