Assignee
KELLER STEFAN
DE·2 granted patents·3 pending applications·10 citations·filing 2005–2015
Top patents by PatentIndex Score
5 records- 0171US7267032B1Multi-offset driver toolKELLER STEFAN·Filed 2005·Granted Sep 11, 2007·7 cites·3 claims
- 0264US8857056B2Method of manufacturing an exhaust gas carrying device and tool thereforKELLER STEFAN·Filed 2009·Granted Oct 14, 2014·3 cites·15 claims
- 0363US2015299853A1Evaporator, deposition arrangement, deposition apparatus and methods of operation thereofKELLER STEFAN·Filed 2013·Application pending·0 cites
- 0450US2015284841A1Plasma enhanced deposition arrangement for evaporation of dielectric materials, deposition apparatus and methods of operating thereofKELLER STEFAN·Filed 2013·Application pending·0 cites
- 0533US2018171466A1Carrier for supporting at least one substrate during a sputter deposition process, apparatus for sputter deposition on at least one substrate, and method for sputter deposition on at least one substrateKELLER STEFAN·Filed 2015·Application pending·0 cites
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