Assignee
KELLOGG MICHAEL C
US·4 granted patents·57 citations·filing 2009–2010
Top patents by PatentIndex Score
4 records- 0196US8485128B2Movable ground ring for a plasma processing chamberKELLOGG MICHAEL C·Filed 2010·Granted Jul 16, 2013·38 cites·20 claims
- 0292US8826855B2C-shaped confinement ring for a plasma processing chamberKELLOGG MICHAEL C·Filed 2010·Granted Sep 9, 2014·16 cites·15 claims
- 0364US9171702B2Consumable isolation ring for movable substrate support assembly of a plasma processing chamberKELLOGG MICHAEL C·Filed 2010·Granted Oct 27, 2015·1 cites·5 claims
- 0464US8628268B2Cam lock electrode clampKELLOGG MICHAEL C·Filed 2009·Granted Jan 14, 2014·2 cites·20 claims
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