Assignee
KHOLODENKO ARNOLD
US·10 granted patents·41 citations·filing 2008–2012
Top patents by PatentIndex Score
10 records- 0188US8261905B2Wafer carrier drive apparatus and method for operating the sameKHOLODENKO ARNOLD·Filed 2010·Granted Sep 11, 2012·11 cites·12 claims
- 0286US8317934B2Multi-stage substrate cleaning method and apparatusKHOLODENKO ARNOLD·Filed 2009·Granted Nov 27, 2012·10 cites·14 claims
- 0384US9111968B2Plasma processing chamber with a grounded electrode assemblyKHOLODENKO ARNOLD·Filed 2010·Granted Aug 18, 2015·11 cites·13 claims
- 0484US8757177B2Multi-stage substrate cleaning method and apparatusKHOLODENKO ARNOLD·Filed 2012·Granted Jun 24, 2014·6 cites·17 claims
- 0565US8584613B2Single substrate processing head for particle removal using low viscosity fluidKHOLODENKO ARNOLD·Filed 2008·Granted Nov 19, 2013·2 cites·6 claims
- 0663US8161984B2Generator for foam to clean substrateKHOLODENKO ARNOLD·Filed 2008·Granted Apr 24, 2012·1 cites·15 claims
- 0754US8317966B2Apparatus for substantially uniform fluid flow rates relative to a proximity head in processing of a wafer surface by a meniscusKHOLODENKO ARNOLD·Filed 2009·Granted Nov 27, 2012·0 cites·20 claims
- 0853US8739805B2Confinement of foam delivered by a proximity headKHOLODENKO ARNOLD·Filed 2008·Granted Jun 3, 2014·0 cites·8 claims
- 0952US8557051B2Method for using generator for foam to clean substrateKHOLODENKO ARNOLD·Filed 2012·Granted Oct 15, 2013·0 cites·20 claims
- 1043US8246755B2In situ morphological characterization of foam for a proximity headKHOLODENKO ARNOLD·Filed 2009·Granted Aug 21, 2012·0 cites·20 claims
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