Assignee
KIDO SHUSAKU
JP·2 granted patents·7 pending applications·1 citations·filing 2005–2012
Top patents by PatentIndex Score
9 records- 0164US8663488B2Apparatus for processing substrate and method of doing the sameKIDO SHUSAKU·Filed 2012·Granted Mar 4, 2014·1 cites·11 claims
- 0256US2009263974A1Substrate processing system for performing exposure process in gas atmosphereKIDO SHUSAKU·Filed 2009·Application pending·0 cites
- 0355US8293128B2Apparatus for processing substrate and method of doing the sameKIDO SHUSAKU·Filed 2009·Granted Oct 23, 2012·0 cites·3 claims
- 0453US2008121173A1Substrate processing system for performing exposure process in gas atmosphereKIDO SHUSAKU·Filed 2007·Application pending·0 cites
- 0550US2006157199A1Substrate processing system for performing exposure process in gas atmosphereKIDO SHUSAKU·Filed 2005·Application pending·0 cites
- 0650US2006070702A1Substrate processing system for performing exposure process in gas atmosphereKIDO SHUSAKU·Filed 2005·Application pending·0 cites
- 0750US2006130759A1Substrate processing system for performing exposure process in gas atmosphereKIDO SHUSAKU·Filed 2005·Application pending·0 cites
- 0850US2006090852A1Substrate processing system for performing exposure process in gas atmosphereKIDO SHUSAKU·Filed 2005·Application pending·0 cites
- 0950US2006090853A1Substrate processing system for performing exposure process in gas atmosphereKIDO SHUSAKU·Filed 2005·Application pending·0 cites
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